Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-29T09:12:05.019Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis of Sic Clusters in a Nonthermal Microwave Plasma

Published online by Cambridge University Press:  28 February 2011

A. K. Singh  and
A. L. Kingon
A. K. Singh
Affiliation:
on study leave from Physics Department, Banaras Hindu University Varanasi 221005, India
A. L. Kingon
Affiliation:
Department of Materials Science and Engineering, Ncsu, Raleigh. NC 27695
Get access

Abstract

A new technique has been developed to condense nanoparticles (clusters) of SiC and other nonoxide materials in a nonthermal microwave plasma. The experimental rationale and approach is described. It utilises silane and acetylene precursors in an Ar diluent, with the synthesis carried out in a microwave plasma at a pressure of ∼1 torr. The plasma conditions have been characterised, as have the effect of important parameters (gas ratios, flow rates and pressure) on the product nanoparticles. The resultant nanoparticles have been characterised ex-situ by TEM, Auger, and XPS spectroscopy. SiC particles collected are ∼5nm in size, with cubic, hexagonal and rhombohedral polytypes observed. Silicon nitride has been synthesised similarly by using silane and nitrogen as the precursor gases. Implications of the new technique are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 206: Symposium G – Clusters and Cluster-Assembled Materials , 1990 , 551
Copyright
Copyright © Materials Research Society 1991

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Lewis, Clifford F., Mat. Eng. May, 30 (1989)Google Scholar
2. Lewis, Clifford F., Mat. Eng. May, 39 (1989)Google Scholar
3. Ault, Neil N. and John, T, Crowe. Ceram. Bull., 68[5] 1062.(1989).Google Scholar
4. Ault, Neil N. and Crowe, John T. Ceram. Bull.; “ 68[5] 1063 (1989).Google Scholar
5. W. Rafaniello, W.,M. R.PIichta.,and A. V. Virkor, J. Am. Ceram. Soc., 66>[4] 272 (1983)[4]+272+(1983)>Google Scholar
6. Motojima, S. and Hasegawa, M., J. Vac. Sci. Technol. a 815, 3763 sep/oct. (1990).Google Scholar
7. Cannon, W R., Danforth, S. C., Flint, J. H., Haggerty, J.S., and Marra, R. A, J. Am. Ceram. Soc., 65[7] 324 (1982)Google Scholar
8. Cannon, W. R., Danforth, S. C., Haggerty, J. S., and Marra, R. A.,,” J. Am. Ceram. Soc., 65[7] 330 (1982).Google Scholar
9. Sawano, K., Haggerty, J. S. and Bowen, H. K., “Formation of SiC Powder from Laser-Heated Vapour Phase Reactions,” J.Ceram.Soc. Jpn 95[1] 64 (1987).Google Scholar
10. Symons, W. and Danforth, S.C.,” pp. 249–56 in Advances in Ceramics Vol. 21, Ceramic Powder Science, Edited by Messing, G. L., Mazdiyasin, K. S., Canley, J. W. Mc. and Haber, R. A.. American Ceramic Society, Westerville,OH, (1987). p. 249 Google Scholar
11. To be submitted to the J. Am. Ceram. Soc.Google Scholar
12. Verma, A R., Krishna, P., “Polymorphism and Polytypism in Crystals”, John Wiley & sons Inc. (1966)Google Scholar
13. Trigunayat, G.C and Verma, A.R., in “Crystallography and Crystal Chemistry of Materials with Layered Structure”, Vol.2, Edited by Levy, F..(D. Reidel publishing Co. 1976) p 269., and references therein.Google Scholar