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Synthesis of Magnetic Nanoparticles by Sputtering

Published online by Cambridge University Press:  26 February 2011

Mai Miyata ,
Kyosuke Kishida ,
Katsushi Tanaka  and
Haruyuki Inui
Mai Miyata
Affiliation:
[email protected], Kyoto University, Department of Materials Science and Engineering, Sakyo-ku, Kyoto, 604-8501, Japan
Kyosuke Kishida
Affiliation:
[email protected], Kyoto University, Department of Materials Science and Engineering, Sakyo-ku, Kyoto, 606-8501, Japan
Katsushi Tanaka
Affiliation:
[email protected], Kyoto University, Department of Materials Science and Engineering, Sakyo-ku, Kyoto, 606-8501, Japan
Haruyuki Inui
Affiliation:
[email protected], Kyoto University, Department of Materials Science and Engineering, Sakyo-ku, Kyoto, 606-8501, Japan
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Abstract

The influence of experimental condition on morphology of FePt and Sm-Co nanoparticles synthesized by sputtering in a relatively high gas pressure has been studied. The sputtering apparatus is equipped with an annealing furnace that enables pre-deposition annealing of the nanoparticles. The effect of the annealing temperature on the ordering to the L10 FePt nanoparticles was also investigated. The morphology of the particles depends on a gas pressure and gas flow rate, but the sensitivity to experimental condition differs between FePt and Sm-Co. The morphology and domain structure of FePt nanoparticle are relatively the same in a wide range of experimental condition, whereas those of Sm-Co nanoparticle are significantly changed by variation of a gas pressure. FePt nanoparticles annealed in the annealing furnace prior to their deposition onto the substrate have the ordered L10 phase, which has an advantage for producing a magnetic recording media.

Keywords

sputteringmagneticnanoscale
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 980: Symposium II – Advanced Intermetallic-Based Alloys , 2006 , 0980-II05-45
Copyright
Copyright © Materials Research Society 2007

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References

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