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Synthesis of Carbon Nitride Composite Thin Films Prepared by Pulsed Laser Deposition Method

Published online by Cambridge University Press:  10 February 2011

Ashok Kumar ,
R. B. Inturi ,
U. Ekanayake ,
H. L. Chan ,
Q. You ,
G. Watiuhewa  and
J. A. Barnard
Ashok Kumar
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
R. B. Inturi
Affiliation:
Department of Metallurgical and Materials Engineering, University of Alabama, Tuscaloosa, AL 35487-0202
U. Ekanayake
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
H. L. Chan
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
Q. You
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
G. Watiuhewa
Affiliation:
Department of Electrical Engineering, University of South Alabama, Mobile, AL 36688
J. A. Barnard
Affiliation:
Department of Metallurgical and Materials Engineering, University of Alabama, Tuscaloosa, AL 35487-0202
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Abstract

Carbon nitride/titanium nitride composite coatings have been deposited on Si (100) and 7059 coming glass by in-situ pulsed laser deposition technique. A pulsed laser (λ = 248 nm) has been used to ablate the both pyrolytic graphite and TiN targets. It has been shown that TiN provides a lattice-matched structural template to seed the growth of carbon nitride crystallites (W. D. Sproul et. al., Appl. Phys. Lett. Vol. 67, 203–205; 1995). This paper describes the same approach to grow carbon nitride composite coatings with varying thicknesses of buffer layer and carbon nitride films at different temperatures and pressures. Our preliminary results show the superior mechanical properties (hardness and modulli). The films have been characterized by Xray diffractometer, SEM, FTIR and Raman spectroscopic techniques.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 434: Symposium U – Layered Materials for Structural Applications , 1996 , 189
Copyright
Copyright © Materials Research Society 1996

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References

[1] Liu, A. Y. and Cohen, M. L., Science 245, (1989) p. 849 Google Scholar
[2] Xiong, F., Chang, R. P., and White, C. W., Mater. Res. Soc. Symp. Proc. 280, (1993) p. 587 Google Scholar
[3] Li, D., Wong, M. S., Chung, Y. W., Cheng, S. C., Chu, X., Lin, X. W., Dravid, V., and Sproul, W. D., Appl. Phys. Lett. 67, 203 (1995)Google Scholar
[4] Kumar, S. and Tansely, T. L., Solid State Commun. 88 (1993) p. 803 Google Scholar
[5] Niu, C., Lu, Y. Z., and Liber, C. M., Science 261 (1993) p.334 Google Scholar
[6] Li, D., Chu, X., Cheng, S., Lin, X., Dravid, V. P., Chung, Y., Wong, M, and Sproul, W. D., Appl. Phys. Lett. 67 (1995) p. 203 Google Scholar
[7] Narayan, J., Tiwari, P., Chen, X., et.al. Appl. Phys. Lett. 61, (1992) p. 1290 Google Scholar
[8] Ashok, Kumar, Narayan, J., and Chen, X., Appl. Phys. Lett. 6, (1992) p. 976 Google Scholar
[9] Kjendal, D., M. S. Thesis, University of South Alabama (1995)Google Scholar
[10] Li, D., Lin, X., Cheng, S. C., Dravid, V. P., Chung, Y, Wong, M. and Sproul, W. D., Appl. Phys. Lett. 68, (1995) p. 1211 Google Scholar
[11] Li, D., Chung, Y., Wong, M., and Sproul, W. D., J. Appl. Phys., 74, (1993) p. 219 Google Scholar