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Synthesis and Characterization of Diamond-Like Carbon Films using Ion Beam Technique

Published online by Cambridge University Press:  21 February 2011

Richard L. C. Wu
Richard L. C. Wu*
Affiliation:
Universal Energy Systems, Inc., 4401 Dayton-Xenia Road, Dayton, OH 45432
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Abstract

Diamond-like carbon (DLC) coatings have been deposited on several infrared transmitting substrates utilizing the ion beam deposition technique. Optimum deposition parameters have been established as a function of source gas composition, source pressure, ion-impact energy, substrate material and cleaning substrate procedures. Extensive characterization of the DLC films was also performed. Rutherford backscattering and proton recoil techniques were used to analyze carbon and hydrogen content and impurities. These films contain 70% atomic carbon and 30% atomic hydrogen. Transmission electron microscopy was used to analyze the crystallinity, void structure and surface microstructure, which were found to be amorphous and dense. Optical properties, such as refractive index and extinction coefficient, were measured using transmission/reflection spectroscopy, ellipsometry and laser calorimetry. Environmental testing was performed using various acids and solvents. The thermal stability and moisture penetration on these DLC films were extensively investigated. The effect of high ion energy radiation on DLC films was studied. Details of the preparation method and characterization of DLC films are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 152: Symposium H – Optical Materials: Processing and Science , 1989 , 33
Copyright
Copyright © Materials Research Society 1989

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References

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