Hostname: page-component-78c5997874-lj6df Total loading time: 0 Render date: 2024-11-05T17:16:01.710Z Has data issue: false hasContentIssue false
  • English
  • Français

Synthesis and Characterization of Amorphous Metallic Alloy Thin Films for MEMS Applications

Published online by Cambridge University Press:  01 February 2011

Senthil N Sambandam ,
Shekhar Bhansali  and
Venkat R. Bhethanabotla
Senthil N Sambandam
Affiliation:
Department of Electrical Engineering, University of South Florida, 4202 E. Fowler Ave., ENB 118, Tampa, FL 33620 Department of Chemical Engineering, University of South Florida, 4202 E. Fowler Ave., ENB 118, Tampa, FL 33620
Shekhar Bhansali
Affiliation:
Department of Electrical Engineering, University of South Florida, 4202 E. Fowler Ave., ENB 118, Tampa, FL 33620
Venkat R. Bhethanabotla
Affiliation:
Department of Chemical Engineering, University of South Florida, 4202 E. Fowler Ave., ENB 118, Tampa, FL 33620
Get access

Abstract

Microstructures of multi-component amorphous metallic glass alloys are becoming increasingly important due to their excellent mechanical properties and low coefficient of friction. In this work, thin films of Zr-Ti-Cu-Ni-Be have been deposited by DC magnetron sputtering in view of exploring their potential technological applications in fields such as Micro Electro Mechanical Systems (MEMS). Their structure, composition, surface morphology, mechanical properties viz., hardness and Young's modulus were analyzed using X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) and Nanoindentation. Influence of the deposition parameters of sputtering pressure and power upon the composition and surface morphology of these films has been evidenced by SEM, and AFM analysis, showing that such a process yields very smooth films with target composition at low sputtering pressures. These studies are useful in understanding the multicomponent sputtering process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 806: Symposium MM – Amorphous and Nanocrystalline Metals , 2003 , MM8.1
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Alley, R. L., Mai, P., Komvopoulous, K., and Howe, R. T., Proceedings of IEEE conference on Transducers '93, 288, (1993).Google Scholar
2. Trojan, K., Grishcke, M., and Dimigen, H, Phys. Sta. Sol., A, 145, p575, (1994).Google Scholar
3. Deng, K., Collins, R. J., Mehragany, M., and Sukenik, C. M., Proceedings of IEEE conference on MicroElectroMecahnical Systems, (1995), p368.Google Scholar
4. Rajan, N., Zorman, C. A., Mehragany, M., DeAnna, R., and Harvey, R. J., Surf. Coat. Technol., 108, 391, (1998).Google Scholar
5. Gloriant, T., J. Non-Cryst. Solids., 316, 96, (2003)Google Scholar
6. Gilbert, C.J., Ritchie, R.O., and Johnson, W.L., App. Phys. Lett., 71, 476, (1997).Google Scholar
7. Peker, A. and Johnson, W. L., App. Phys. Lett., 63, 2342, (1993).Google Scholar
8. Damonte, L. C., Mendoza-Zelis, L. A., Deledda, S., and Eckert, J., Mater. Sci. and Eng. A, 343, 194, (2003).Google Scholar
9. Sharma, S. K., Strunskus, T., Ladebusch, H., and Faupel, F., Mater. Sci. and Eng. A, 304, 747, (2001).Google Scholar
10. Zhang, Y., Zhao, D. Q., Pan, M. X., and Wang, W. H., J. Non Cryst. Solids, 315, 206, (2003).Google Scholar
11. A company specialized in Zr-Ti-Cu-Ni-Be alloy products (www.liquidmetal.com).Google Scholar
12. Gao, Y. L., Shen, J., Sun, J. F., Chen, D. M., Wang, G., Wang, H.R., Xing, D.W., Xian, H.Z., and Zhou, B.D., Mater. Lett., 4161, 1, (2002).Google Scholar
13. Sambandam, S.N., Bhansali, S., Bhethanabotla, V.R., J. App. Phys, (2003) (submitted)Google Scholar