Article contents
Surface Processing And Micromachining of Polyimide Driven by A High Average Power Infra-Red Free Electron Laser
Published online by Cambridge University Press: 10 February 2011
Abstract
The long history and wide use of polyimide as a dielectric in the microelectronics industry has made it a favorite material for laser processing studies. The FEL used in the present work delivered picosecond-long 25 microjoule pulses at approximately 3.10 and 5.80 microns. The former is not associated with any strong absorption, while the latter is the strongest absorption band in the IR. This study explored hole drilling and surface transformation of as-made and aluminized DuPont Kapton HN PMDA-ODA polyimde film.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2000
References
- 1
- Cited by