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Surface Chemistry of Te-RICH CdTe

Published online by Cambridge University Press:  25 February 2011

J.J. Zinck ,
P.D. Brewer  and
G.L. Olson
J.J. Zinck
Affiliation:
Hughes Research Laboratories, Malibu, CA 90265
P.D. Brewer
Affiliation:
Hughes Research Laboratories, Malibu, CA 90265
G.L. Olson
Affiliation:
Hughes Research Laboratories, Malibu, CA 90265
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Abstract

A study of the changes in surface structure and composition of CdTe(100) irradiated by 248 nm excimer laser radiation in the fluence range 18-75 mJ/cm2 is presented. Material is removed from the CdTe surface at all fluences, but above a threshold fluence of 40 mJ/cm2 the surface becomes Te-rich. Reflection high energy electron diffraction measurements indicate that the original 2×1 surface reconstruction is converted to a 1×1 pattern at fluences < 40 mJ/cm2. At exposures which generate a Te-rich surface a RHEED pattern is not observed. Temperature programmed desorption experiments show that weakly bound Tex exists on the surface after exposure at all fluences used in this study. A correlation of Auger data, desorption lineshapes, and model calculations suggest that the excess Te forms three dimensional islands on the surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 204: Symposium E – Chemical Perspectives of Microelectronic Materials II , 1990 , 243
Copyright
Copyright © Materials Research Society 1991

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References

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