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Superlattices from Diamond

Published online by Cambridge University Press:  31 January 2011

Hideyuki Watanabe  and
S. Shikata
Hideyuki Watanabe
Affiliation:
[email protected]
S. Shikata
Affiliation:
Diamond Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Japan, [email protected]
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Abstract

Diamond superlattices were fabricated by producing multilayer structures of isotopically pure carbon-12 (12C) and carbon-13 (13C), which confine electrons by a difference in band-gap energy. Secondary ion mass spectrometry (SIMS) measurements were employed to characterize the isotopic composition of the diamond superlattices. Layers between 2 nm and 350 nm in thickness can be designed and fabricated using a microwave plasma-assisted chemical vapor deposition technique.

Keywords

diamondchemical vapor deposition (CVD) (chemical reaction)epitaxy
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1203: Symposium J – Diamond Electronics and Bioelectronics-Fundamentals to Applications III , 2009 , 1203-J13-04
Copyright
Copyright © Materials Research Society 2010

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