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Superconducting Yba2Cu3O7- δ Thin Films on Srtio3 and Si Grown In-Situ by Ion Beam Sputtering

Published online by Cambridge University Press:  28 February 2011

B.J. Kellett ,
J.H. James ,
A. Gauzzi ,
M. Affronte  and
D. Pavuna
B.J. Kellett
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
J.H. James
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
A. Gauzzi
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
M. Affronte
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
D. Pavuna
Affiliation:
Institute of Micro and Optoelectronics, Department of Physics, Swiss Federal Institute of Technology, (E.P.F.L), CH‐1015, Lausanne, Switzerland
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Abstract

Superconducting YBa2Cu3O7‐ δ (YBCO) films 100‐300nm thick have been grown in‐situ on (100) SrTiO3 at 650°C by ion beam sputtering. Targets of Cu, CuO, Y, Y2O3, BaF2, BaCO3 and YBa2Cu3O7‐ δ have been studied. Uniform composition throughout the film thickness has been achieved by co‐sputtering. Films are metallic (p300=300μΩcm) and textured, with Tc onsets at 92K and Tco=82K. Jc(77K) exceeds 105 Acm‐2. Films grown in‐situ on Si with ZrOx/Y2O3 and In2O3(10 at.%SnO2) buffer layers show Tc onsets at about 90K and Tco at about 50K, annealing improves Tco to 60K with resistivities p30o=2000μΩcm and 4000μΩcm respectively.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 169: Symposium M – High Temperature Superconductors: Fundamental Properties and Novel Materials Processing , 1989 , 639
Copyright
Copyright © Materials Research Society 1990

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References

1 Michel, S., James, J.H., Dwir, B., Kellett, B.J. and Pavuna, D.. “The Preparation of YBCO Thin Films by a Four Ion Beam Co‐Deposition System”, J. Less Common Metals, Vol 151, pp 419‐427, (1989).Google Scholar
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