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Superconducting Yba2Cu3O7-δ Thin Films on Srtio3 and Si Grown In-Situ by Ion Beam Sputtering
Published online by Cambridge University Press: 28 February 2011
Abstract
Superconducting YBa2Cu3O7‐δ (YBCO) films 100‐300nm thick have been grown in‐situ on (100) SrTiO3 at 650°C by ion beam sputtering. Targets of Cu, CuO, Y, Y2O3, BaF2, BaCO3 and YBa2Cu3O7‐δ have been studied. Uniform composition throughout the film thickness has been achieved by co‐sputtering. Films are metallic (p300=300μΩcm) and textured, with Tc onsets at 92K and Tco=82K. Jc(77K) exceeds 105 Acm‐2. Films grown in‐situ on Si with ZrOx/Y2O3 and In2O3(10 at.%SnO2) buffer layers show Tc onsets at about 90K and Tco at about 50K, annealing improves Tco to 60K with resistivities p30o=2000μΩcm and 4000μΩcm respectively.
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- Copyright © Materials Research Society 1990
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