Hostname: page-component-78c5997874-m6dg7 Total loading time: 0 Render date: 2024-11-20T01:20:12.822Z Has data issue: false hasContentIssue false
  • English
  • Français

Sub-Feature Speckle Interferometry: A New Approach To Temperature Measurement

Published online by Cambridge University Press:  15 February 2011

D. Burckel ,
S. H. Zaidi  and
S. R. J. Brueck
D. Burckel
Affiliation:
Center for High Technology Materials, University of New Mexico, Albuquerque, NM 87131
S. H. Zaidi
Affiliation:
Center for High Technology Materials, University of New Mexico, Albuquerque, NM 87131
S. R. J. Brueck
Affiliation:
Center for High Technology Materials, University of New Mexico, Albuquerque, NM 87131
Get access

Abstract

A new speckle technique, sub-feature speckle interferometry, is introduced that relies on the amplitude interference of two independent speckle patterns, originating from coherent illumination, using an optical system that produces interferometric quality interference fringes on a scale comparable to the speckle correlation length. Examples are given for in-plane translation, sample tilt, and temperature measurement (strain). A temperature measurement accuracy σ = 0.92°C is realized. In contrast to traditional full-field speckle cross-correlation techniques, this technique requires only a small number of detector elements with minimal signal processing and is compatible with many real-time sensor applications. Measurements of the optical phase across a speckle feature are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 387: Symposium P – Rapid Thermal and Integrated Processing IV , 1995 , 125
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Fiory, A.T. and Nanda, A.K., MRS Symp. Proc. 342, 3 (1994).Google Scholar
2. Degertekin, F.L., Pei, Jun, Khuri-Yakub, B. T., and Saraswat, K.C., Appl. Phys. Let., 64, 1338 (1993).Google Scholar
3. Cullen, C.W. and Sturm, J.C., MRS Symp. Proc. 342, 23 (1994).Google Scholar
4. Zaidi, S.H., Brueck, S.R.J., and McNeil, J.R., Jour. Vac. Sci. Tech., B10, 166 (1992).Google Scholar
5. Burckel, D., Zaidi, S.H., Lang, M.K., Frauenglass, A. and Brueck, S.R.J., MRS Symp. Proc. 342, 17(1994).Google Scholar
6. Burckel, D., Zaidi, S.H., Frauenglass, A., Lang, M.K., and Brueck, S.R.J., Opt. Lett. 20, 315 (1995).Google Scholar