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Study of scalable IBS nanopatterning mechanisms for III-V semiconductors using in-situ surface characterization

Published online by Cambridge University Press:  27 September 2011

Jean Paul Allain ,
Osman El-Atwani ,
Alex Cimaroli ,
Daniel L. Rokusek ,
Sami Ortoleva  and
Anastassiya Suslova
Jean Paul Allain
Affiliation:
Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, West Lafayette, IN 47907, USA
Osman El-Atwani
Affiliation:
Purdue University, West Lafayette, IN 47907, USA Birck Nanotechnology Center, West Lafayette, IN 47907, USA
Alex Cimaroli
Affiliation:
Purdue University, West Lafayette, IN 47907, USA
Daniel L. Rokusek
Affiliation:
Purdue University, West Lafayette, IN 47907, USA
Sami Ortoleva
Affiliation:
Purdue University, West Lafayette, IN 47907, USA
Anastassiya Suslova
Affiliation:
Purdue University, West Lafayette, IN 47907, USA
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Abstract

Ion-beam sputtering (IBS) has been studied as a means for scalable, mask-less nanopatterning of surfaces. Patterning at the nanoscale has been achieved for numerous types of materials including: semiconductors, metals and insulators. Although much work has been focused on tailoring nanopatterning by systematic ion-beam parameter manipulation, limited work has addressed elucidating on the underlying mechanisms for self-organization of multi-component surfaces. In particular there has been little attention to correlate the surface chemistry variation during ion irradiation with the evolution of surface morphology and nanoscale self-organization. Moreover the role of surface impurities on patterning is not well known and characterization during the time-scale of modification remains challenging. This work summarizes an in-situ approach to characterize the evolution of surface chemistry during irradiation and its correlation to surface nanopatterning for a variety of multi-components surfaces. The work highlights the importance and role of surface impurities in nanopatterning of a surface during low-energy ion irradiation. In particular, it shows the importance of irradiation-driven mechanisms in GaSb(100) nanopatterning by low-energy ions and how the study of these systems can be impacted by oxide formation.

Keywords

sputteringIII-Vion-solid interactions
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1354: Symposium II – Ion Beams—New Applications from Mesoscale to Nanoscale , 2011 , mrss11-1354-ii02-03
Copyright
Copyright © Materials Research Society 2011

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References

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