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A Study of Oxygen Reduction of Tin- or Zinc-doped Indium Oxide (ITO or IZO) Film Induced by Deposition of Silicon Nitride Film in PECVD Process

Published online by Cambridge University Press:  01 February 2011

Byoung-June Kim ,
Youn-Mo Choi ,
Kunal Girotra ,
Sung-Hoon Yang ,
Shi-Yul Kim ,
Soon-Kwon Lim  and
Jun-Hyung Souk
Byoung-June Kim
Affiliation:
[email protected], Samsung Electronics, Process Development Team, LCD R&D Center, LCD Business, Process Development Team, LCD R&D Center, Samsung LCD Business, Samsung Electronics,, Gyeonggi-Do, N/A, 449-711, Korea, Republic of, +82-31-209-9227, +82-31-209-1549
Youn-Mo Choi
Affiliation:
[email protected], Samsung Electronics Co. Ltd., Process Development Team, LCD R&D Center, LCD Business, Gyeonggi-Do, N/A, 449-711, Korea, Republic of
Kunal Girotra
Affiliation:
[email protected], Samsung Electronics Co. Ltd., Process Development Team, LCD R&D Center, LCD Business, Gyeonggi-Do, N/A, 449-711, Korea, Republic of
Sung-Hoon Yang
Affiliation:
[email protected], Samsung Electronics Co. Ltd., Process Development Team, LCD R&D Center, LCD Business, Gyeonggi-Do, N/A, 449-711, Korea, Republic of
Shi-Yul Kim
Affiliation:
[email protected], Samsung Electronics Co. Ltd., Process Development Team, LCD R&D Center, LCD Business, Gyeonggi-Do, N/A, 449-711, Korea, Republic of
Soon-Kwon Lim
Affiliation:
[email protected], Samsung Electronics Co. Ltd., Process Development Team, LCD R&D Center, LCD Business, Gyeonggi-Do, N/A, 449-711, Korea, Republic of
Jun-Hyung Souk
Affiliation:
[email protected], Samsung Electronics Co. Ltd., Process Development Team, LCD R&D Center, LCD Business, Gyeonggi-Do, N/A, 449-711, Korea, Republic of
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Abstract

In the thin film transistor fabrication process, tin doped indium oxide (ITO) or zinc doped indium oxide (IZO) film can be easily exposed to hydrogen-containing plasma during the deposition of silicon nitride (SiNx) film. By this exposure, ITO or IZO can be easily reduced into its corresponding metallic element such as indium, which degrades the optical transmittance and the conductivity. In this study, SiNx was deposited onto ITO or IZO film, and the oxygen reduction of ITO or IZO during PECVD SiNx deposition was analyzed to clarify this phenomenon. The oxygen reduction during PECVD SiNx deposition is mainly induced by decomposed NH3 gas. However, the progress of ITO reduction is different from that of IZO reduction, due to the different atomic composition of In2O3 in the composite and the different critical temperature of reduction initiation between indium oxide, tin oxide, and zinc oxide.

Keywords

transparent conductorchemical vapor deposition (CVD) (chemical reaction)In
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 936: Symposium L – Materials for Next-Generation Display Systems , 2006 , 0936-L05-08
Copyright
Copyright © Materials Research Society 2006

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