Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-19T22:56:25.739Z Has data issue: false hasContentIssue false
  • English
  • Français

The Structure of the (001)Si/SiO2 Interface

Published online by Cambridge University Press:  22 February 2011

A. Ourmazd  and
J. Bevk
A. Ourmazd
Affiliation:
AT&T Bell Laboratories, Holmdel, NJ 07733.
J. Bevk
Affiliation:
AT&T Bell Laboratories, Murray Hill, NJ 07974.
Get access

Abstract

We show that a careful examination of previous microscopic structural data from the Si/SiO2 interface reveals that the presence of an epitaxial interfacial oxide cannot be ruled out, and describe the conditions necessary for a definitive search for an intervening layer between c-Si and a-SiO2 We present electron diffraction and lattice imaging data, which establish the c-Si→a-SiO2 transition to take place via a crystalline layer ˜7 A thick. Modelling of lattice images in two projections indicates the crystalline oxide to be tridymite, a stable, bulk phase of SiO2

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 105: Symposium F – SiO2 and Its Interfaces , 1987 , 1
Copyright
Copyright © Materials Research Society 1988

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Pantelides, S. T. and Long, M., Physics of SiO 2 and its Interfaces, ed. Pantelides, S. T. (Pergamon, NY, 1978) p. 339 Google Scholar
2. Goodnick, S. M., Ferry, D. K., Wilmsen, C. W., Liliental, Z., Fathy, D. and Krivanek, O.L, Phys. Rev. B, 32, 8171 (1985), and references therein.Google Scholar
3. Rochet, F., Rigo, S., Froment, M., d'Anterroches, C., Maillot, C., Roulet, H. and Dufour, G., Advances in Phys. 35, 237 (1986).Google Scholar
4. Fuoss, P. H., Norton, L J., Brennan, S. and Fischer-Colbrie, A., Phys. Rev. Lett., (in press).Google Scholar
5. Bevk, J., Ourmazd, A., Feldman, L C., Pearsall, T. P., Bonar, J. M., Davidson, B. A. and Mannaerts, J. P., Appl. Phys. Lett. 50, 760 (1987).CrossRefGoogle Scholar
6. Bourret, A., Hinze, E. and Hochheimer, H. D., Phys. Chem. Minerals, 13,206 (1986).Google Scholar
7. Hill, V. G. and Roy, R., Trans. Brit. Cer. Soc., 57,496 (1958).Google Scholar
8. Dollase, W. A., Acta Cryst. 23, 617 (1967).Google Scholar
9. Bourret, A., Thibault-Dessaux, J., d'Anterroches, C., Penison, J. M. and deCrecy, A., J. Microscopy, 129,337 (1982).CrossRefGoogle Scholar
10. Ourmazd, A., Taylor, D. W., Rentschler, J. A. and Bevk, J., Phys. Rev. Lett. 59, 213 (1987).CrossRefGoogle Scholar
11. Tu, K. N. and Howie, A., Phil. Mag. B 37,73 (1978).Google Scholar
12. Ermenko, V. G. and Nikitenko, V. I., Phys. Stat. Scl.(a), 14, 317 (1972).Google Scholar
13. Pirouz, P., Chaim, R. and Samuels, J., Bulletin of Academy of Sciences of USSR, to be published.Google Scholar