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Structural Studies of Sputter-Deposited MoS2 Solid Lubricant Films

Published online by Cambridge University Press:  28 February 2011

Michael R. Hilton  and
Paul D. Fleischauer
Michael R. Hilton
Affiliation:
Chemistry and Physics Laboratory, The Aerospace Corporation, P.O. Box 92957, M2-271, Los Angeles, CA 90009
Paul D. Fleischauer
Affiliation:
Chemistry and Physics Laboratory, The Aerospace Corporation, P.O. Box 92957, M2-271, Los Angeles, CA 90009
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Abstract

The relationship between the morphologies and crystal structures of sputter-deposited MoS2 films and their lubricating capabilities is discussed. In particular, aspects of plastic deformation processes are presented. Scanning elecron microscopy (top surface and cross sectional), transmission electron microscopy (lattice imaging and dark field), and x-ray diffraction techniques were used to characterize film structure. The asdeposited morphology, which can be described in terms of zone models, was found to influence the initial nature of the wear debris and the loadbearing capabilities of the films. In many cases a highly deformed region confined to the surface of the films was found. Applied stress was found to reorient crystallites and to induce crystallization, with the degree of both processes being related to the initial structure of the film. Criteria are presented for selecting the film type and preparation conditions to fit various applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 140: Symposium S – New Materials Approaches to Tribology: Theory and Applications , 1988 , 227
Copyright
Copyright © Materials Research Society 1989

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References

1. Gardos, M. N., Lubr. Eng. 32, 463 (1976).Google Scholar
2. Cristy, R. I., Thin Solid Films 73, 299 (1980).Google Scholar
3. Stupp, B. C., Thin Solid Films 84, 257 (1981).CrossRefGoogle Scholar
4. Niederhauser, P., Hintermann, H. E., and Maillat, M., Thin Solid Films 108, 209 (1983).Google Scholar
5. Stupp, B. C., Proc. 3rd Int. Conf. on Solid Lubrication, Denver, Colo., American Society of Lubrication Engineers, Park Ridge, Ill., SP-14, (1984), p. 217.Google Scholar
6. Spalvins, T., ASLE Trans. 14, 267 (1971).Google Scholar
7. Spalvins, T., ASLE Trans. 17, 1 (1973).Google Scholar
8. Nishimura, M., Nosaka, M., Suzuki, M., and Miyakawa, Y., Proc. 2nd ASLE Int. Sol. Lubr. Conf., Denver, Colo., American Society of Lubrication Engineers, Park Ridge, Ill., SP-6 (1978), p. 128.Google Scholar
9. Spalvins, T., Thin Solid Films 73, 291 (1980).CrossRefGoogle Scholar
10. Spalvins, T., Thin Solid Films 96, 17 (1982).Google Scholar
11. Buck, V., Wear 91, 281 (1983).Google Scholar
12. Fleischauer, P. D., ASLE Trans. 27, 82 (1984).Google Scholar
13. Spalvins, T., Proc. 3rd Int. Conf. on Solid Lubrication, Denver, Colo., American Society of Lubrication Engineers, Park Ridge, Ill., SP-14 (1984), p. 201.Google Scholar
14. Bichsel, R., Buffat, P., and Levy, F., J. Phys. D: Appl. Phys. 19, 1575 (1986).Google Scholar
15. Buck, V., Thin Solid Films 139, 157 (1986).Google Scholar
16. Buck, V., Vacuum 36, 89 (1986).CrossRefGoogle Scholar
17. Roberts, E. W., 20th American Mechanisms Symp., NASA Lewis Research Center, Cleveland, Oh. (May 1986), p. 103.Google Scholar
18. Roberts, E. W., Proc. Inst. Mech. Eng., Tribologv - Friction.- Lubrication and Wear, Fifty Years On, London, England, Vol. I, (July 1987), p. 503.Google Scholar
19. Mikkelsen, N. J., Chcvallier, J., and Sorensen, G., Appl. Phys. Lett. 52, 1130 (1988).Google Scholar
20. Lince, J. R. and Fleischauer, P. D., J. Mater. Res. 2(6), 827 (1987).Google Scholar
21. Fleischauer, P. D. and Bauer, R., Tribology Transactions 31, 239 (1988).Google Scholar
22. Menoud, C., Maillat, M., and Hintermann, H. E., Proc. 15th Int. Conf. on Metallurgical Coatings, San Diego, Calif. (11-15 April 1988) (to be published in Thin Solid Films).Google Scholar
23. Except for Ref. 22.Google Scholar
24. Thornton, J. A., Ann. Rev. Mater. Sci. 7 (1977).Google Scholar
25. Thornton, J. A., J. Vac. Sci. & Technol. A, 4(6), 3059 (1986).Google Scholar
26. Movchan, B. A. and Demchishin, A. V., Phys. Met. Metallogr. 28, 83 (1969).Google Scholar
27. Hilton, M. R. and Fleischauer, P. D., “On The Use of a Brale Indenter to Evaluate the Cross-Sectional Morphology and Adhesion of Sputter-Deposited MoS 2 Solid Lubricant Films” (submitted to Thin Solid Films).Google Scholar
28. Bertrand, P. A., “Orientation of RF-Sputter-Deposited MoS 2 Films”, J. Mater. Res. (in press).Google Scholar
29. Sundgren, J.-E., Johansson, B.-O., Karlsson, S.-E., and Hentzell, H. T. G., Thin Solid Films 105, 367 (1983).Google Scholar
30. Fleischauer, P. D. and Bauer, R., ASLE Trans. 30, 160 (1987).Google Scholar