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STM studies of island nucleation during hyperthermal atom deposition

Published online by Cambridge University Press:  11 February 2011

Joshua M. Pomeroy  and
Joel D. Brock
Joshua M. Pomeroy*
Affiliation:
Cornell Center for Materials Research
Joel D. Brock
Affiliation:
Cornell Center for Materials Research
*
* currently with Los Alamos National Laboratory
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Abstract

We report fundamental changes in island nucleation dynamics as the kinetic energy of the constituent particles used for film grown is increased. A hyperthermal energy ion beam-line with precise control over ion kinetic energy was used to grow copper islands on a Cu(100) substrate. Dramatic increases in island densities were observed with increasing kinetic energy from thermal energies to 150 eV. We find that sputter erosion and the formation of adatom-vacancy pairs contribute to this increase. In addition, variations in flux and temperature suggest that the mean-field scaling exponent is sensitive to atomistic mechanisms activated by the ion beam.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 749: Symposium W – Morphological and Compositional Evolution of Thin Films , 2002 , W16.6
Copyright
Copyright © Materials Research Society 2003

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References

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