Article contents
Stem Microanalysis of Hazed Polycrystalline Silicon Layers
Published online by Cambridge University Press: 21 February 2011
Abstract
The LPCVD of polysilicon on oxidized silicon wafers sometimes results in defective material having a “hazed” appearance. Examination of this material by SEM has revealed surface nodules which correlate on a one-to-one basis with anomalously large silicon grains, observed by transmission microscopy. Darkfield microscopy has shown that this abnormal grain growth initiated during deposition. X-ray EDS analysis of isolated poly-Si nodules revealed the presence of metallic impurities.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 2006
References
REFERENCES
- 1
- Cited by