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Spectroscopy and Photoreactions of Organometallic Molecules on Surfaces

Published online by Cambridge University Press:  15 February 2011

C. J. Chen  and
R. M. Osgood Jr.
C. J. Chen
Affiliation:
Columbia Radiation Laboratory and Department of Electrical Engineering, Columbia University, New York, NY 10027
R. M. Osgood Jr.
Affiliation:
Columbia Radiation Laboratory and Department of Electrical Engineering, Columbia University, New York, NY 10027
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Abstract

A study of the UV photochemistry of organometallic molecules in the vapor and adsorbed phases is discussed. The gas-phase spectra is interpreted on the basis of molecular orbital theory and experimental data. The absorption spectra of the surface adlayers are determined by computer subtraction of the gas-phase spectra and an intepretation is provided. The influence of metalsubstrate microstructure on UV photochemical reactions of metal alkyls is briefly discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 17: Symposium I – Laser Diagnostics and Photochemical Processing for Semiconductor Devices , 1982 , 169
Copyright
Copyright © Materials Research Society 1983

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References

REFERENCES

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