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Spatially Resolved Characterization of Plastic Deformation Induced by Focused-Ion Beam Processing in Structured InGaN/GaN Layers

Published online by Cambridge University Press:  01 February 2011

R. Barabash ,
G. Ice ,
R. Kroger ,
H. Lohmeyer ,
K. Sebald ,
J. Gutowski ,
T. Bottcher ,
D. Hommel ,
W. Liu  and
J.-S. Chung
R. Barabash
Affiliation:
[email protected], Oak Ridge National Laboratory, Materials Science and Technology, One Bethel Valley Road, Oak Ridge, TN, 37831-6118, United States, 865-2417230, 865-5747659
G. Ice
Affiliation:
[email protected], Oak Ridge National Laboratory, Materials Science and Technology, One Bethel Valley Road, Oak Ridge, TN, 37831-6118, United States
R. Kroger
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
H. Lohmeyer
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
K. Sebald
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
J. Gutowski
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
T. Bottcher
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
D. Hommel
Affiliation:
[email protected], Institute of Solid State Physics, Bremen, N/A, Germany
W. Liu
Affiliation:
[email protected], Advanced Photon Source, Argonne, IL, 60439, United States
J.-S. Chung
Affiliation:
[email protected], Oak Ridge National Laboratory, Materials Science and Technology, One Bethel Valley Road, Oak Ridge, TN, 37831-6118, United States
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Abstract

In this study the results of polychromatic X-ray microbeam analysis (PXM) of the structural changes caused by FIB in nitride heterostructures are presented and discussed in connection with micro-photoluminescence (μ-PL), fluorescent analysis, scanning electron (SEM) and transmission electron microscopy (TEM) data. It is shown that FIB processing distorts the lattice in the InGaN/GaN layer not only in the immediate vicinity of the processed area but also in the surroundings. A narrow amorphidized top layer is formed in the direct ion beam impact area.

Keywords

ion-beam processingIII-Vx-ray diffraction (XRD)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1020: Symposium GG – Ion-Beam-Based Nanofabrication , 2007 , 1020-GG01-07
Copyright
Copyright © Materials Research Society 2007

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References

1. Lohmeyer, H., Sebald, K., Gutowski, J., Kröger, R., Kruse, C., Hommel, D., Wiersig, J., Jahnke, F., Eur. Phys. J. B 48, 291–294 (2005).Google Scholar
2. Maafl, R., Grolimund, D., Van Petegem, S., , Willimann, Jensen, M., Swygenhoven, M. Van, Lehnert, H., Gijs, T., M., M.A., Volkert, C.A., Lilleodden, E.T., & Schwaiger, R. Appl. Phys. Lett. 89, 151905 (2006).Google Scholar
3. Greer, J. R., Oliver, W.C., Nix, W.D., Acta Mater., 53, 1821–1830 (2005)Google Scholar
4. Jin, S.X., Li, J.Z., Lin, J.Y., Jiang, H.X., Appl.Phys.Lett. 76, 631 (2000)Google Scholar
5. Barabash, R.I., Ice, G.E., (2005). “Microdiffraction Analysis of Hierarchical Dislocation Organization In: Encyclopedia of Materials: Science and Technology Updates, Elsevier, Oxford. 1–18 Google Scholar
6. Barabash, R.I., Roder, C., Ice, G.E., Einfeldt, S., Budai, J.D., Barabash, O.M., Figge, S., Hommel, D., J Appl. Physics, 100, 053103–1 (2006)Google Scholar
7. Barabash, R.I., Ice, G.E., Liu, W., Einfeldt, S., Hommel, D., Roskovski, A.M., Davis, R.F., Physica Status Solidi(a, 202, 5, 732–738, (2005)Google Scholar