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Some Applications of SIMS and SSMS in Materials Characterization

Published online by Cambridge University Press:  22 February 2011

J. Verlinden ,
R. Vlaeminck ,
F. Adams  and
R. Gijbels
J. Verlinden
Affiliation:
University of Antwerp, U.I.A., Dept. of Chemistry, Universiteitsplein 1, B-2610 Antwerp-Wilrijk, Belgium.
R. Vlaeminck
Affiliation:
Bell Telephone Mfg.Co., Gasmeterlaan 106, B-9000 Gent, Belgium
F. Adams
Affiliation:
University of Antwerp, U.I.A., Dept. of Chemistry, Universiteitsplein 1, B-2610 Antwerp-Wilrijk, Belgium.
R. Gijbels
Affiliation:
University of Antwerp, U.I.A., Dept. of Chemistry, Universiteitsplein 1, B-2610 Antwerp-Wilrijk, Belgium.
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Abstract

Some applications of spark source mass spectrometry are given showing that this technique, often considered as suitable for bulk analysis only, can also be used for the determination of impurities in thin layers and for in-depth profiling in rather thick samples.

Secondary ion mass spectrometry, in addition to its applications in surface- and in-depth analysis, can successfully be applied to quantitative analysis when using the matrix ion species ratio as an environment sensitive indicator, or when using the isotope dilution method.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 48: Symposium E – Applied Materials Characterization , 1985 , 331
Copyright
Copyright © Materials Research Society 1985

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References

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