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Size Distribution Of Embedded Nano-Crystallites In Polymorphous Silicon Studied By Raman Spectroscopy And Photoluminescence

Published online by Cambridge University Press:  01 February 2011

V. Tripathi ,
Y. N. Mohapatra ,
V. Suendo  and
P. Roca i Cabarrocas
V. Tripathi
Affiliation:
Department of Physics, IIT, and Kanpur-208016, INDIAE-mail:[email protected]. N. Islam QAED/SRG, Space Application Centre (ISRO), Ahemdabad-380015 (India)
Y. N. Mohapatra
Affiliation:
Department of Physics, IIT, and Kanpur-208016, INDIAE-mail:[email protected]. N. Islam QAED/SRG, Space Application Centre (ISRO), Ahemdabad-380015 (India)
V. Suendo
Affiliation:
Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 du CNRS), Ecole Polytechnique, 91128 Palaiseau Cedex, France
P. Roca i Cabarrocas
Affiliation:
Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 du CNRS), Ecole Polytechnique, 91128 Palaiseau Cedex, France
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Abstract

Polymorphous Silicon (pm-Si:H) deposited by Plasma Enhanced Chemical Vapour Deposition (PECVD) has emerged as an alternative material to amorphous silicon (a-Si:H). Deposition parameters of pm-Si:H are such that small crystallites get embedded in a relaxed amorphous silicon matrix, thus improving the optical and electrical properties. We study the size of crystallites and degree of order in pm-Si:H using Raman and photoluminescence (PL) spectra of pm-Si:H and a-Si:H. Raman Spectra of a variety of hydrogenated nanostructured silicon (pmSi:H) and amorphous Silicon (a-Si:H) samples grown at different pressures were analyzed. Deconvolution of observed multiple peaks in photoluminescence spectra and fitting to Gaussian size distribution also yields particle size to be in the range of 2.3 to 3.5nm in agreement with Transmission Electron Microscopy and Raman results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 762: Symposium A – Amorphous and Nanocrystalline Silicon-Based Films – 2003 , 2003 , A19.7
Copyright
Copyright © Materials Research Society 2003

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