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Simple Fabrication of High Density Quantum Dot Arrays Using Anodic Aluminum Oxide Mask
Published online by Cambridge University Press: 21 March 2011
Abstract
We fabricated quantum dot arrays using anodic alumina mask. We grew an alumina template on Si wafers by two-step anodization. The porous alumina template thus grown is used as a mask for metal deposition. After thermal evaporation and removal of the mask, we fabricated the quantum dot arrarys on a Si substrate. Using this template-assisted method we obtained a high density array of quantum dots in a large scale. These quantum dots have a narrow size distribution which can be easily controlled by a pore widening of templates from 20 to 60 nm.
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- Copyright © Materials Research Society 2004
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