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Simox Material Development for Sub-0.25µm Cmos Technology
Published online by Cambridge University Press: 22 February 2011
Abstract
Advantages of SOI materials for CMOS technology arc discussed. The lending SOI materials for CMOS applications appear to be SIMOX and BSOl presently. Progress made in two types of SIMOX, namely, standard and thin BOX. is presented. Recent results from 200mm SIMOX are included. Finally, various defects in annealed SIMOX are discussed. An effort has been made to present data which is typical of commercial SIMOX.
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- Copyright © Materials Research Society 1994
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