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Silicon Nitride Tools Coated With Tic Or Tin Composite Diamond Structures

Published online by Cambridge University Press:  10 February 2011

W.D. Fan ,
K. Jagannadham  and
J. Narayan
W.D. Fan
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, [email protected]
K. Jagannadham
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, [email protected]
J. Narayan
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, [email protected]
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Abstract

Composite diamond coatings on Si3N4 substrates have been developed to minimize stresses/strains and improve wear and adhesion properties. The coatings consist of a first layer of discontinuous diamond crystallites which are anchored to the Si3N4 substrate by a second interposing layer of TiC or TiN film. A top third layer of continuous diamond film is grown epitaxially on the first layer. The diamond films and TiC or TiN films were deposited using hot filament chemical vapor deposition and laser physical vapor deposition, respectively. The TiC and TiN films were examined by X-ray diffraction. The diamond films were characterized by scanning electron microscopy and Raman spectroscopy. Adhesion of the diamond coatings was investigated using overlap polishing with diamond paste, wear against Al-12.5%Si alloy, and pull-test. The results show that after introducing an interposing layer of TiC or TiN, adhesion of diamond coatings on Si3N4 substrates is improved significantly. After polishing test against diamond paste for 4 hours, only 30% of diamond was retained with single diamond coating while 80% of diamond was found with TiN composite diamond coating. The mechanism of improvement of adhesion is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 415: Symposium BB – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics II , 1995 , 45
Copyright
Copyright © Materials Research Society 1996

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References

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