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Silicon as a Mechanical Material

Published online by Cambridge University Press:  25 February 2011

Kurt Petersen
Kurt Petersen*
Affiliation:
NovaSensor, 1055 Mission Court, Fremont, CA 94539
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Abstract

Now that single crystal silicon has established itself as the preeminent electronic material, increasing applications are being implemented in which silicon's MECHANICAL properties are more important. This paper reviews some of the history behind this trend, explains how and why silicon can be an economical and effective mechanical material, and describes several of the devices which have been demonstrated in this technology.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 76: Symposium C – Science and Technology of Microfabrication , 1986 , 99
Copyright
Copyright © Materials Research Society 1987

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References

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