Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-02T16:15:58.349Z Has data issue: false hasContentIssue false
  • English
  • Français

Selective Etching of SnO2:F Films with a Pulse Programmable Industrial Fiber Laser

Published online by Cambridge University Press:  24 June 2013

M. Rekow ,
T. Panarello  and
W. S. Sampath
M. Rekow
Affiliation:
EOlite Systems, Inc. 275 Rue Kesmark, Dollard-des-Ormeaux, Québec H9B 3J1, Canada
T. Panarello
Affiliation:
EOlite Systems, Inc. 275 Rue Kesmark, Dollard-des-Ormeaux, Québec H9B 3J1, Canada
W. S. Sampath
Affiliation:
NSF I/UCRC for Next Generation Photovoltaics, Colorado State University, Fort Collins, CO, USA
Get access

Abstract

In our work on laser scribing CdTe solar cells we have found what appears to be an unpublished laser material interaction that allows precise laser etching of SnO2 films to an arbitrary thickness with high uniformity. This precise and efficient laser etching mechanism allows arbitrary reduction of the film thickness in a controlled manner on the scale of tens of nm. In addition to the fine depth selection, we find that there develops a pulse duration dependent microstructure on the surface. This micro microstructure results in a strong diffraction effect in the visible portion of the spectrum. In this work we propose a physical mechanism behind this novel depth selective laser interaction as well as the resultant micro-structure. Finally we demonstrate and propose some possible applications for this process.

Keywords

laser ablationlaser decompositionlaser-induced reaction
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1494: Symposium F – Oxide Semiconductors and Thin Films , 2013 , pp. 277 - 290
Copyright
Copyright © Materials Research Society 2013 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Selective Removal of TCO Stack Layers for CdTe P1 Process with a Tailored Pulse Laser. Rekow, M., Murison, R., Dinkel, C., Panarello, T., Nikumb, S., Sampath, W. S.. Seattle: IEEE PVSC Proceedings, 2011.CrossRefGoogle Scholar
Wager, John F., Keszler, Douglas A., Presley, Rick E. Transparent Electronics. s.l. : Springer, 2008. ISBN 978-0-387-72342-6.Google Scholar
LIA. LIA Handbook of Laser Materials Processing. Orlando: Magnolia Publishing Inc, 2001. 0-941463-02-8.Google Scholar
VON ROTTKAY, K., RUBIN, M.. OPTICAL INDICES OF PYROLYTIC TIN-OXIDE GLASS. Mater. Res. Soc. Symp. 1996.CrossRefGoogle Scholar
Application of a Pulse Programmable Fiber Laser to a Broad Range of Micro-Processing Applications. Rekow, M, et al. . Anaheim: LIA, 2010.CrossRefGoogle Scholar
Modification of dielectric surfaces with ultra-short laser pulses. Costache, Florenta, Matthias, Henyk, and Jürgen, Reif. 2002, Applied surface science, Vol. 186.1, pp. 352–357.Google Scholar
Observations of higher-order laser-induced surface ripples on 〈111〉 germanium. Fauchet, P. M..Siegman, A. E. 2, s.l. : Springer Berlin / Heidelberg, 11 1, 1983, Applied Physics A: Materials Science & Processing, Vol. 33. 0947–8396.Google Scholar
Surface structures on crystalline silicon irradiated by 10 ps laser pulses at 694.3 nm. Lee, T. D., Lee, H. W., Kim, J. K., Park, C. O. s.l. : Springer Berlin / Heidelberg, 1989, Applied Physics A: Materials Science & Processing. 10.1007/BF00619721.Google Scholar
Gurvich, L. V., Veyts, I. V., Alcock, C. B.. Thermodynamic Properties of Individual Substances: Part 1, Volume 2Elements C, Si, Ge, Sn, Pb and Their Compounds. Moscow: Hemisphere Publishing Corporation, 1979. ISBN 0-89116-533-9.Google Scholar
Mol, Antonius Maria Bernardus van. Chemical Vapour Deposition. Thesis. s.l. : Technische Universiteit Eindhoven, 2003.Google Scholar
Photoreflectance Probing of Below Gap States in Gan/Algan High Electron Mobility Transitor Structures. Gaskilla, D. K., Glembockia, O. J., Peresa, B., Henrya, R., Koleskea, D. and Wickenden, A.. s.l. : MRS, 2002.CrossRefGoogle Scholar
Infrared studies on SnO2 and Pd/SnO2. Amalric-Popescu, D., Bozon-Verduraz, F.. 2001, Catalysis Today, Vol. 70, pp. 139–154.Google Scholar
Thermal dissociation of compressed ZnO and SnO2 powders in a moving-front solar thermochemical reactor. Chambon, Marc, Abanades, Stéphane*, Flamant, Gilles. 8, s.l. : AIChE Journal, 2010, Vol. 57. DOI: 10.1002/aic.12432.Google Scholar