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Scanning Electron-Beam Dielectric Microscopy for the Temperature Coefficient Distribution of Dielectric Materials

Published online by Cambridge University Press:  17 March 2011

Yasuo Cho
Yasuo Cho*
Affiliation:
Research Institute of Electrical Communication, Tohoku University, 2-1-1 Katahira Aoba-ku Sendai 980-8577, Japan
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Abstract

Studies on scanning electron-beam dielectric microscopy (SEDM) are reported. This microscopy technique is used for determining the temperature coefficient distribution of dielectric materials using an electron-beam as a heat source instead of a light beam as in photothermal dielectric microscopy. This microscopy technique, which has the ability to simultaneously observe SEM images and the material composition by EPMA, has a resolution better than that of photothermal dielectric microscopy. To demonstrate the usefulness of this technique, the two-dimensional image of a two-phase composite ceramic composed of TiO2 and Bi2Ti4O11 is measured. To shorten a measurement time, a new type of SEDM for measuring the real time transient response caused by a single pulsed electron-beam is also successfully developed. Finally, a quantitative measurement method of temperature coefficient is also developed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 700: Symposium S – Combinatorial and Artificial Intelligence Methods in Materials Science , 2001 , S3.5
Copyright
Copyright © Materials Research Society 2002

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