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A saw Sensor Study of the Relative Adhesion and Surface Properties of Polyimide Films

Published online by Cambridge University Press:  22 February 2011

D. W. Galipeau ,
C. Feger  and
J. F. Veteldmo
D. W. Galipeau
Affiliation:
Laboratory for Surface Science and Technology and Department of Electrical Engineering, University of Maine, Orono. ME 04469
C. Feger
Affiliation:
IBM T. J. Watson Research Center, Room 39–114, P.O.Box 218, Yorktown Heights. NY 10598
J. F. Veteldmo
Affiliation:
Laboratory for Surface Science and Technology and Department of Electrical Engineering, University of Maine, Orono. ME 04469
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Abstract

A surface acoustic wave (SAW) sensor is used to study the relative humidity response of polyimide films where interfacial and surface properties are varied. The relationship between these responses and the relative adhesion strength of these films is of particular interest since it could have application as a nondestructive, quantitative measure of adhesion strength. The results show clear differences in the SAW humidity response for cured and uncured films. There are also significant differences in the SAW humidity response for films applied with and without adhesion promoter. In addition the humidity response has proven to be particularly sensitive to the surface treatment of the polyimide film. These results suggest applications of the SAW sensor as a cure indicator, an in-situ sensor for the monitoring of film surface properties in process control applications and as an adhesion sensor.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 239: Symposium D – Thin Films: Stresses and Mechanical Properties III , 1991 , 617
Copyright
Copyright © Materials Research Society 1992

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References

REFERENCES

1. See for example IEEE Transactions on Ultrasonics, Ferroelectries and Frequency Control, Special Issue on Acoustic Sensors, 34 No. 2, (1987).Google Scholar
2. Wohltjen, H. and Dessy, R., Analytical Chemistry, 51, 1472 (1979).Google Scholar
3. Groetschlll, J. A. and Dessy, R. E.. Journal of Appl. Polymer Science, 28. 161 (1983).Google Scholar
4. Ballantine, D. S. Jr, and Wohltjen, H., in Chemical Sensors and Microinstrumentation. Murry, R. W. ed. (American Chemical Society, Washington, DC, 1989), pp. 222–236.Google Scholar
5. Fertsch, M. T., White, R. M. and Muller, R. S., Device Research Conf., Ithica, NY, 1980.Google Scholar
6. Chuang, C. T. and White, R. M., IEEE Ultrasonics Symposium, Chicago. IL, 1981, pp. 159–162.Google Scholar
7. Joshi, S. G. and Brace, J. G., IEEE Ultrasonics Symposium, San Francisco. CA, 1985. pp. 600–604.Google Scholar
8. Martin, S. J., Frye, G. C., Ricco, A. J. and Zipperian, T. E., IEEE Ultrasonics Symposium, Denver, Colorado, 1987, pp. 563–567.Google Scholar
9. Brace, J. G., Sanfelippo, T. S. and Joshi, S. G., Sensors and Actuators, 14. 47 (1988).Google Scholar
10. Han, B., Gryte, C., Tong, H and Feger, C., Soc. of Plastics Engineers ANTEC, 1988, pp. 994–996.Google Scholar
11. Noe, S. C., Pan, J. Y., and Senturia, S. D., Soc. of Plastics Engineers ANTEC, Montreal, 1991, pp. 1598–1601.Google Scholar
12. Pan, J. Y. and Senturia, S. D.. Soc. of Plastics Engineers ANTEC. Montreal. 1991, pp. 1618–1621.Google Scholar
13. Fowkes, F. M., J. of Adhesion Sci. Tech., 1, 7 (1987).Google Scholar
14. Suryanarayana, D. and Mittal, K. L., J. of Applied Polymer Science, 22, 2039 (1984).Google Scholar
15. Galipeau, D. W., Feger, C., Vetelino, J. F. and Lec, R.. Third International Meeting on Chemical Sensors, Cleveland. Ohio. 1990, pp. 95–98.Google Scholar
16. Galipeau, D. W., Feger, C., Vetelino, J. F. and Lec, R.. Society of Plastics Engineers ANTEC, Montreal, 1991. pp. 1679–1682.Google Scholar
17. Bauer, C. L. and Farris, R. J.. in Polvimides: Materials. Chemistry and Characterization. Feger, C. ed. (Elsevier.Amsterdam 1989) pp. 549–562.Google Scholar
18. Sinha, B. K. and Locke, S.. Transactions on UFFC. 36 No. 2. 231 (1989).Google Scholar
19. Denton, D. D., Camou, J. B. and Senturia, S. D.. in Moisture and Humidity. (Instrument Society of America, 1985) pp. 505–513.Google Scholar