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The Role Of Steps On The Micro Structure Of Titanium-Oxide Films Deposited By Pld Onto (100) Mgo Surfaces

Published online by Cambridge University Press:  15 February 2011

Simon King  and
C. Barry Carter
Simon King
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, 421, Washington Av S.E., Minneapolis, MN 55455.
C. Barry Carter
Affiliation:
Department of Chemical Engineering and Materials Science, University of Minnesota, 421, Washington Av S.E., Minneapolis, MN 55455.
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Abstract

The phenomenon of graphoepitaxy, whereby island nucleation occurs preferentially at steps, is a prime example of a manner in which the substrate morphology (and notably surface steps) can affect the microstructure of as-deposited thin-films. This paper provides a further illustration of the fundamental importance of the substrate morphology to the development of the thin-film microstructure, employing the example of TiO2 deposited by pulsed-laser deposition (PLD) directly onto specially prepared (100) MgO TEM foils. The same areas of these foils are imaged both before and after deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 317: Symposium B – Mechanisms of Thin Film Evolution , 1993 , 65
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

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