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The Role of Heavy Hydrocarbons in Cvd Diamond Growth

Published online by Cambridge University Press:  25 February 2011

Ching-Hsong Wu ,
T. J. Potter  and
M. A. Tamor
Ching-Hsong Wu
Affiliation:
Ford Research Laboratory, P.O. Box 2053, MD 3028, Dearborn, MI 48121–2053
T. J. Potter
Affiliation:
Ford Research Laboratory, P.O. Box 2053, MD 3028, Dearborn, MI 48121–2053
M. A. Tamor
Affiliation:
Ford Research Laboratory, P.O. Box 2053, MD 3028, Dearborn, MI 48121–2053
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Abstract

A mass spectrometric analysis of heavy hydrocarbons (HHCs) during hot-filament CVD diamond growth was performed together with in situ monitoring of the growth rate. Many HHCs were detected and tentatively identified. Of all HHCs studied, only diacetylene shows good correlation with the diamond growth rate under various deposition conditions. Its possible role is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 270: Symposium M – Novel Forms of Carbon , 1992 , 371
Copyright
Copyright © Materials Research Society 1992

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References

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