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Role of Film-Substrate Interaction in Determining the Morphology of Thin Films

Published online by Cambridge University Press:  25 February 2011

Marcia H. Grabow  and
George H. Gilmer
Marcia H. Grabow
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974.
George H. Gilmer
Affiliation:
AT&T Bell Laboratories, Murray Hill, New Jersey 07974.
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Abstract

The equilibrium structure and metastable states of thin films have been investigated using molecular dynamics computer simulations. The energy as a function of coverage for a variety of film/substrate systems has been determined, and this information has been used to determine the growth mode and the conditions under which the film is dislocation free. In particular, the influence of the strength of the film-substrate binding will be discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 13
Copyright
Copyright © Materials Research Society 1988

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References

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