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Role of Electron Microscopy in Semiconductor Electronic Defects Analysis

Published online by Cambridge University Press:  28 February 2011

P. M. Petroff
P. M. Petroff*
Affiliation:
AT&T Bell Laboratories, 600 Mountain Avenue, Murray Hill, New Jersey 07974
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Abstract

A review of the Transmission Electron Microscopy and Scanning Transmission Electron Microscopy techniques used for electronic defect identification is presented. The structural, chemical and STEM based spectroscopy methods for electronic defect analysis are discussed along with selected examples.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 46: Symposium B – Microscopic Identification of Electronic Defects in Semiconductors , 1985 , 433
Copyright
Copyright © Materials Research Society 1985

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References

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