Hostname: page-component-f554764f5-qhdkw Total loading time: 0 Render date: 2025-04-11T13:53:08.382Z Has data issue: false hasContentIssue false
  • English
  • Français

Role of Electron Microscopy in Semiconductor Electronic Defects Analysis

Published online by Cambridge University Press:  28 February 2011

P. M. Petroff
P. M. Petroff*
Affiliation:
AT&T Bell Laboratories, 600 Mountain Avenue, Murray Hill, New Jersey 07974
Get access

Abstract

A review of the Transmission Electron Microscopy and Scanning Transmission Electron Microscopy techniques used for electronic defect identification is presented. The structural, chemical and STEM based spectroscopy methods for electronic defect analysis are discussed along with selected examples.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 46: Symposium B – Microscopic Identification of Electronic Defects in Semiconductors , 1985 , 433
Copyright
Copyright © Materials Research Society 1985

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

Article purchase

Temporarily unavailable

References

1. Kimerling, L.C., Patel, J.R., VLSI Electronics Microstructure Science, ed. (Einspurch Academic Press P. 223, (1985).Google Scholar
2. Yamamoto, N., Petroff, P.M., Patel, J.R., J. Appl. Phys., 54, 6, 3475 (1983).Google Scholar
3. Bourret, A., Thirteenth International Conference on Defects in Semiconductors, ed. (Kimerling, L. C., and Parsey, J. M. Jr, Metallurgical Society of AIME, Warrendale, PA 15086), p. 129 (1985).Google Scholar
4. Ponce, F.A., Yamashita, T., Hahn, S., Appl. Phys. Lett., 43, 1051, (1983).Google Scholar
5. Ourmazd, A., Bourret, A., Schroter, W., J. Appl. Phys., 56, 1670, (1984).Google Scholar
6. Gibson, J.M., Hull, R., Bean, J.C., Treacy, M.J., Appl. Phys. Lett., 46, 7, 649 (1985).Google Scholar
7. Petroff, P.M., Lang, D.V., Appl. Phys. Lett., 31, 2, 60 (1977).Google Scholar
8. Petroff, P.M., Lang, D.V., Strudel, J.L., Logan, R.A., SEM Inc., ed. (AMF O'Hare, Illinois 60656), p. 325, (1978).Google Scholar
9. Petroff, P.M., Logan, R.A., Savage, A., Phys. Rev. Lett., 44, 4, 287 (1980).Google Scholar
10. Petroff, P.M., Lang, D.V., Logan, R.A., Johnston, W.D. Jr, Inst. Phys. Conf. Ser., No. 46, Ch. 7, 427 (1979).Google Scholar
11. Magnea, N., Petroff, P.M., Capasso, F., Logan, R.A., Slavi, W., Cho, A.Y., Appl. Phys. Lett., (to be published).Google Scholar