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Residual Stresses in Single and Multilayer Composite Diamond Coatings
Published online by Cambridge University Press: 10 February 2011
Abstract
Residual stresses were measured in different types of diamond coatings deposited onto molybdenum substrates by hot filament chemical vapor deposition. The types of coatings examined include a continuous single layer diamond coating and a continuous multilayer diamond composite coating with an aluminum nitride embedding layer. The stresses were determined by X-ray diffraction and Raman spectroscopy and compared.
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- Copyright © Materials Research Society 1997
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