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Residual Deformations Induced By The Thermal Shock During Pulsed Ion Implantation

Published online by Cambridge University Press:  21 February 2011

Jorge N. Feugeas ,
S. P. BrÜhl ,
G. Sanchez  and
G. H. Kaufmann
Jorge N. Feugeas
Affiliation:
Instituto de Fisica Rosario (CONICET-UNR), Bv. 27 de Febrero 210 bis, 2000 Rosario, Argentina
S. P. BrÜhl
Affiliation:
Instituto de Fisica Rosario (CONICET-UNR), Bv. 27 de Febrero 210 bis, 2000 Rosario, Argentina
G. Sanchez
Affiliation:
Instituto de Fisica Rosario (CONICET-UNR), Bv. 27 de Febrero 210 bis, 2000 Rosario, Argentina
G. H. Kaufmann
Affiliation:
Instituto de Fisica Rosario (CONICET-UNR), Bv. 27 de Febrero 210 bis, 2000 Rosario, Argentina
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Abstract

Samples of AISI 316 Stainless Steel were nitrogen and argon ion implanted with pulsed beams generated with a Plasma Gun operated in the detonation mode. The residual deformations induced by the beams were studied by double exposure (before and after implantation) holographic interferometry.

The results showed residual deformations corresponding to a concave situation, with the total value depending on the number of single pulses accumulated. A saturation in the deformation is observed when the number of pulses is > 20. A model of the process of pulsed irradiation (based on the strong thermal effect due to the short duration of pulses) and the state of stresses induced in the surface layers is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 354: Symposium A – Beam Solid Interactions for Materials Synthesis and Characterization , 1994 , 33
Copyright
Copyright © Materials Research Society 1995

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References

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