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Reflection High-energy Electron Diffraction Study of Nanostructures: From Diffraction Patterns to Surface Pole Figure

Published online by Cambridge University Press:  31 January 2011

Fu Tang
Affiliation:
[email protected], Rensselaer Polytechnic Institute, Physics, Troy, New York, United States
Toh-Ming Lu
Affiliation:
[email protected], Rensselaer Polytechnic Institute, Physics, Troy, New York, United States
Gwo Ching Wang
Affiliation:
[email protected], Rensselaer Polytechnic Institute, Physics, 1C25 Science Center, 110 8th Street, Troy, New York, 12180, United States, 518 276 8387, 518 276 6680
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Abstract

In this report we present a brief overview of the growth of nanostructures by the oblique angle deposition where the nanostructures possess both out-of-plane and in-plane preferred orientations or a biaxial texture. The degree of preferred crystal orientations can be quantitatively determined from a method called “RHEED surface pole figure analysis” that we developed recently.

Type
Research Article
Copyright
Copyright © Materials Research Society 2009

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References

[1] Drotar, J.T., Lu, T.-M., and Wang, G.-C., J. Appl. Phys. 96, 7071 (2004).Google Scholar
[2] Tang, F., Gaire, C., Ye, D.-X., Karabacak, T., Lu, T.-M., and Wang, G.-C., Phys. Rev. B72 (3), 35430–1 (2005).Google Scholar
[3] Tang, F., Wang, G.-C., and Lu, T.-M., Appl. Phys. Lett. 89, 241903 (2006).Google Scholar
[4] Tang, F., Parker, T., Wang, G.-C., and Lu, T.-M., J. Physics D: Appl. Phys. 40, R427 (2007).Google Scholar
[5] Robbie, K. and Brett, M.J., J. Vac. Sci. Technol. A15, 1460 (1997).Google Scholar
[6] Helming, K. and Preckwinkel, U., Solid State Phenomena 105, 71 (2005).Google Scholar
[7] Lee, S.L., Windover, D., Doxbeck, M., Nielsen, M., Kumar, A., and Lu, T.-M., Thin Solid Films 377, 447 (2000).Google Scholar
[8] Bunge, H.J. and Klein, H., Zeitschrift Fur Metallkunde 87, 465 (1996).Google Scholar
[9] Rodriguez-Navarro, A. B., J. Appl. Cryst. 40, 631 (2007).Google Scholar
[10] Schäfer, B. and Schwarzer, R.A., Materials Science Forum 273–275, 223 (1998).Google Scholar
[11] See, for example, Elements of X-ray Diffraction, Cullity, B.D., (Addison-Welsley, 1978), p. 297.Google Scholar
[12] Tang, F., Wang, G.-C., and Lu, T.-M., J. Appl. Phys. 102, 014306 (2007).Google Scholar