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Recoil Implantation of Ito thin Films on Glass Substrates*

Published online by Cambridge University Press:  25 February 2011

B. H. Rabin ,
B. B. Harbison  and
S. R. Shatynski
B. H. Rabin
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, NY 12181
B. B. Harbison
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, NY 12181
S. R. Shatynski
Affiliation:
Materials Engineering Department, Rensselaer Polytechnic Institute, Troy, NY 12181
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Abstract

Indium-Tin Oxide (ITO) heat mirror films implanted into window glass were obtained by post annealing of argon irradiated coatings of In-5w/o Sn produced by reactive evaporation in oxygen. Characterization of coatings has been carried out using TEM and AES. Optical properties have also been evaluated. The production of acceptable thin films requires low energy deposition rates during ion bombardment. This places a limit on the extent of film-substrate mixing, which is required if increased film lifetimes are to be realized.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 765
Copyright
Copyright © Materials Research Society 1984

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Footnotes

*

The authors are thankful to Professor Stephen R. Shatynski who unfortunately was killed on September 23, 1983. Without his guidance and energies this research would not have been possible. Barry Rabin is a General Electric Company Fellow. The authors also acknowledge the support of Consolidated Edison of New York under Grant No.1–04900.

References

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