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Recent Progress with Surface Analysis by Laser Ionization

Published online by Cambridge University Press:  25 February 2011

Christopher H. Becker
Christopher H. Becker*
Affiliation:
Chemical Physics Laboratory, Sri International, Menlo Park, CA 94025, USA
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Abstract

This paper briefly reviews previous results and developments, then presents new results, using a novel surface analytical technique that uses non-resonant multiphoton ionization (MPI) of neutral atoms and molecules sputtered by an ion beam, or desorbed by an electron beam or laser beam. In this method, which we call surface analysis by laser ionization (SALI), the non-resonant MPI, or “laser ionization,” is coupled with state-of-the-art time-of-flight mass spectrometry to provide extremely sensitive, general, and readily quantifiable surface analysis. Examples are presented for two applications relevant to the semiconductor industry and for the analysis of the near surface region of two specially pretreated stainless steels. A discussion also describes the favorable prospects for implementation of SALI with submicron dimension liquid metal ion beams for microanalysis, including situations with electron beam sensitive samples.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 69: Symposium D – Materials Characterization , 1986 , 59
Copyright
Copyright © Materials Research Society 1986

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