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Recent Development in Hitachi Transmission Electron Microscope

Published online by Cambridge University Press:  21 February 2011

Shigeto Isakozawa ,
Isao Matsui ,
Shoji Kamimura  and
Akira Tonomura
Shigeto Isakozawa
Affiliation:
Naka Works, Hitachi, Ltd., 882 Ichige, Katsuta, Ibaraki 312, Japan;
Isao Matsui
Affiliation:
Naka Works, Hitachi, Ltd., 882 Ichige, Katsuta, Ibaraki 312, Japan;
Shoji Kamimura
Affiliation:
Naka Works, Hitachi, Ltd., 882 Ichige, Katsuta, Ibaraki 312, Japan;
Akira Tonomura
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185, Japan
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Extract

The 200 kV electron microscope has been extensively utilized as a high grade model for diversified applications. This paper reports image resolution available at present with the Hitachi 200 kV Electron Microscope Model H-800 and possible techniques for improving present resolution limit which depends on the aberrations of objective lens.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 31: Symposium N – Electron Microscopy of Materials , 1983 , 63
Copyright
Copyright © Materials Research Society 2006

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References

REFERENCE

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