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Real-Time X-Ray Scattering Study of Surface Dynamics on Au(111) During Ar+ Ion Irradiation

Published online by Cambridge University Press:  10 February 2011

M.V. Ramana Murty
Affiliation:
Department of Physics and Cornell Center for Materials Research, Cornell University, Ithaca, NY 14853
T. Curcic
Affiliation:
Department of Physics and Cornell Center for Materials Research, Cornell University, Ithaca, NY 14853
A. Judy
Affiliation:
Department of Physics and Cornell Center for Materials Research, Cornell University, Ithaca, NY 14853
B.H. Cooper
Affiliation:
Department of Physics and Cornell Center for Materials Research, Cornell University, Ithaca, NY 14853
A.R. Woll
Affiliation:
School of Applied and Engineering Physics and Cornell Center for Materials Research, Cornell University, Ithaca, NY 14853
J.D. Brock
Affiliation:
School of Applied and Engineering Physics and Cornell Center for Materials Research, Cornell University, Ithaca, NY 14853
S. Kycia
Affiliation:
Cornell High Energy Synchrotron Source, Cornell University, Ithaca, NY 14853
R.L. Headrick
Affiliation:
Cornell High Energy Synchrotron Source, Cornell University, Ithaca, NY 14853
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Abstract

X-ray scattering is used to investigate the surface dynamics on Au(111) during Ar+ ion irradiation. During 500 eV Ar+ ion irradiation, we observe the three regimes of step retraction, quasi-layer-by-layer removal and three dimensional rough erosion, analagous to molecular beam epitaxy. The quasi-layer-by-layer sputtering regime has been studied to identify similarities and differences in surface evolution during ion irradiation and molecular beam epitaxy. X-ray measurements suggest that 500 eV Ar+ ion irradiation does not lead to stable adatom island formation. Also, in contrast to molecular beam epitaxy, adatom detachment and diffusion seems important in describing the surface kinetics during ion irradiation.

Type
Research Article
Copyright
Copyright © Materials Research Society 1998

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