Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-29T09:16:57.886Z Has data issue: false hasContentIssue false
  • English
  • Français

Raman Vibrational Study of Pulsed Laser Annealing of Implanted GaAs

Published online by Cambridge University Press:  22 February 2011

J. Sapriel  and
Y.I. Nissim
J. Sapriel
Affiliation:
Centre National d'Etudes des Télécommunications, Laboratoire de Bagneux, 196 rue de Paris, 92220 Bagneux - (FRANCE)
Y.I. Nissim
Affiliation:
Centre National d'Etudes des Télécommunications, Laboratoire de Bagneux, 196 rue de Paris, 92220 Bagneux - (FRANCE)
Get access

Abstract

The lattice reconstruction produced by a pulsed laser irradiation in heavily damaged GaAs layers is studied. Spatially resolved Raman measurements are used to characterize the crystalline quality after the annealing cycle produced by a O-switched Ruby laser or by a picosecond pulsed Nd-YAG laser. The continuous evolution in the Raman spectra is usèd to follow the crystal recovery as a function of the irradiation parameters.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 23 , 1983 , 713
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1]Eisen, F.H. in “Laser and Electron Beam Processing of Materials”, edited by White, C.W. and Peercy, P.S. (Academic Press, New York, 1980), p. 309Google Scholar
[2]Jusserand, B. and Sapriel, J., Phys. Rev. B24, 7194 (1981)Google Scholar
[3]Shuker, R. and Gamnon, R.W., Phys. Rev. Lett 25 (1970) 222Google Scholar
[4]Rama Rao, C.S., Sundaram, S., Schmidt, R.S. and Comas, J., J. Appl. Phys., 54 (1983) 1808Google Scholar
[5]Smith, J.E, Brodsky, M.H., Crowder, B.L., Nathan, M.I., In Proc 2nd Intern. Conf. Light Scattering in Solids, Paris, 1971 (Flammarion, Paris,1971)p.330Google Scholar
[6]Trommer, R. and Cardona, M., Phys. Rev. B17,1865 (1978)Google Scholar
[7]Liu, P.L., Yen, R., Bloembergen, N. and Hodgson, R.T., Appl. Phys. Lett. 34 (1979) 864Google Scholar
[8]Sapriel, J., Nissim, Y.I. and Oudar, J.L. in “Laser-Solid Interactions” and Transient Thermal Processing of Materials, J. Narayan, W.L. Brown and R.A. Lemons eds, North Holland 1983, p.235Google Scholar
[9]Nlissim, Y.I., Sapriel, J., Oudar, J.L., Appl. Phys. Lett.,42 (1983) 504Google Scholar
[10]Nissim, Y.I., Joukoff, B., Sapriel, J. and Henoc, P. (These Proceedings)Google Scholar