Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-25T15:23:21.101Z Has data issue: false hasContentIssue false
  • English
  • Français

Raman Studies of Phase Transformations In Pulse Laser Irradiated Dielectric Films

Published online by Cambridge University Press:  26 February 2011

Gregory J. Exarhos
Gregory J. Exarhos*
Affiliation:
Pacific Northwest Laboratory, P. O. Box 999, Richland, WA 99352
Get access

Abstract

Sputter deposited TiO2 and ZrO2 films on silica have been characterized with regard to thickness, phase purity, and residual film stress using nondestructive Raman spectroscopic techniques. Irradiated anatase coatings exhibit vibrational features that irreversibly shift to higher frequencies, suggesting an increase in localized stress. Catastrophic damage is manifested by the appearance of a higher density rutile phase. Rutile coatings examined after irradiation show only intensity changes, while amorphous coatings were found to rapidly crystallize under high-pulse energy irradiation. Results of these studies are compared with equilibrium Raman measurements of thermally-induced transformations in these materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 51: Symposium A – Beam-Solid Interactions and Phase Transformations , 1985 , 179
Copyright
Copyright © Materials Research Society 1985

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Pawlewicz, W. T., Exarhos, G. J., and Conaway, W. E., Applied Optics 22(12), 1837–1840 (1983).Google Scholar
2. Exarhos, G. J., in Applied Materials Characterization, Vol. 48. (Materials Research Society, Pittsburgh, 1985) pp. 461–469.Google Scholar
3. Long, S. H., She, C. Y., and Exarhos, G. J., Applied Optics 23(18), 3049–3051 (1984).Google Scholar
4. Exarhos, G. J., J. Chem. Phys. 81(11), 5211–5212 (1984).CrossRefGoogle Scholar
5. Exarhos, G. J., and Pawlewicz, W. T., Applied Optics 23(12), 1986–1988 (1984).Google Scholar
6. Nemanich, R. J., Tsai, C. C., and Connell, G. A. N., Phys. Rev. Lett. 44, 273–276 (1980).Google Scholar
7. Ohsaka, T., Yamaoka, S., and Shimomura, O., Solid State Commun. 30, 345–347 (1979).CrossRefGoogle Scholar
8. Samara, G. A., and Peercy, P. S., Phys. Rev. B. 7, 1131–1148 (1973).Google Scholar
9. Malyj, M. and Griffiths, J. E., Applied Spectros E 37(4), 315–333 (1983).Google Scholar
10. Exarhos, G. J., Proc. Soc. Photo-Opt Instrumentation, Eng. 540, 460–466 (1985).Google Scholar
11. Pawlewicz, W. T., Hays, D. C., and Martin, P. M., Thin Solid Films 73, 169–175 (1980).Google Scholar
12. Capwell, R. J., Spagnolo, K., and DeSesa, M. A., Appl. Spectrosco. 26, 537–539 (1972).Google Scholar