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Radiation Enhanced Diffusion in Ion-Implanted Glasses and Glass/Metal Couples*

Published online by Cambridge University Press:  25 February 2011

G. W. Arnold
G. W. Arnold*
Affiliation:
Sandia National Laboratories, Albuquerque, NM 87185
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Abstract

Ion implantation causes alkali migration to the surface in alkali silicate glasses. Rutherford backscattering spectrometry was used to follow this depletion. Room temperature implantations of 5×1016 250 keV Xe/cm2 in 12M20·88SiO2 (M = Li,Na,K,Rb,Cs) removes approximately equal numbers (within a factor of 2) of alkali from the glass. Low temperature (77K) implants significantly reduce the alkali loss. These results imply a radiationenhanced diffusion mechanism in which the alkali interchanges with the products of the collision cascade, with the kinetics being limited by the radiation damage components. The results for mixed-alkali glasses ((12−x)M2O·xCs20·88Si02) give further evidence for this process. In glass/'metal couples, radiation enhanced diffusion allows the interchange of glass network components with deposited metals. Rutherford backscattering spectrometry was used to follow the interchange of silicate and phosphate glass components with metal ions near the heavy-ion implanted interface between glass substrate and metal (Al,Zr) films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 27: Symposium E – Ion Implantation and Ion Beam Processing of Materials , 1983 , 61
Copyright
Copyright © Materials Research Society 1984

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Footnotes

*

This work performed at Sandia National Laboratories supported by the U. S. Department of Energy under contract #DE–AC04–76DP00789.

References

REFERENCES

1. Bills, D. G. and Evett, A. A., J. Appl. Phys. 30 (1959) 564.Google Scholar
2. Lineweaver, J. L., J. Appl. Phys. 34 (1963) 1786.Google Scholar
3. Holland, L., The Properties of Glass Surfaces (Chapman and Hall, London, 1966) p. 317.Google Scholar
4. Carter, G. and Grant, W. A., Phys. Chem. Glasses 7 (1966) 94.Google Scholar
5. Thomas, S., J. Appl. Phys. 45 (1974) 161.Google Scholar
6. Pantano, C. G. Jr., Dove, D. B., and Onada, G. Y. Jr., J. Vac. Sci. Techn. 13 (1976) 414.Google Scholar
7. Usher, D. M., J. Phys. C: Solid State Phys. 14 (1981) 2039.Google Scholar
8. Whitkop, P. G., Surf. Sci. 10 (1981) 261.Google Scholar
9. Rauschenbach, B. and Blasek, G., Appl. Phys. 22 (1980) 233.Google Scholar
10. Arnold, G. W. and Borders, J. A., J. Appl. Phys. 48 (1977) 1488.Google Scholar
11. Arnold, G. W. and Borders, J. A., in: Applications of Ion Beams to Materials, 1975, Eds. Carter, G., Collington, J. S., and Grant, W. A., Conference Series, No. 28 (The Institute of Physics, Bristol, 1976) 121.Google Scholar
12. Borders, J. A. and Arnold, G. W., in: Ion Beam Surface Layer Analysis, Vol. 1, 1976, Eds. Meyer, O., Linder, G., and Kappeler, F. (Plenum, NY, (1977) 415.Google Scholar
13. Arnold, G. W. and Peercy, P. S., J. Non-Crystalline Solids 41 (1980) 359.Google Scholar
14. Battaglin, G., Della Mea, G., DeMarchi, G., and Mazzoldi, P., Rad. Eff. 64 (1982) 99.Google Scholar
15. Battaglin, G., Della Mea, G., DeMarchi, G., Mazzoldi, P., Miotello, A., and Guglielmi, M., J. Phys. C: Solid State Phys. 15 (1982) 5623.Google Scholar
16. Miotello, A. and Mazzoldi, P., J. Phys. C: Solid State Phys. 15 (1982) 5615.Google Scholar
17. Miotello, A. and Mazzoldi, P., J. Phys. C: Solid State Phys. 16 (1983) 221.Google Scholar
18. Mazzoldi, P., Nucl. Inst. Methods 209/210 (1983) 1089.Google Scholar
19. Mayer, J. W., Tsaur, B. Y., Lau, S. S., and Hung, L-S., Nucl. Inst. Methods 182/183 (1981) 1.Google Scholar
20. Chu, W. K., Crowder, B. L., Mayer, J. W., and Ziegler, J. F., Appl. Phys. Lett. 22 (1973) 490.Google Scholar
21. Liau, Z. L., Mayer, J. W., Brown, W. L., and Poate, J. M., J. Appl. Phys. 49 (1978) 5295.Google Scholar
22. Tooley, F. V. in: The Handbook of Glass Manufacture, Vol. II, Ed. Tooley, F. V. (Books for Industry, Inc., NY, 1974) p. 999.Google Scholar
23. A preliminary account of these investigations has been presented at the 2nd International Conference on Radiation Effects in Insulators Albuquerque, NM May 30-June 3, 1983. (Nucl. Inst. Methods, to be published).Google Scholar
24. Paul, A., J. Mats. Sci. 12 (1977) 2246.Google Scholar