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Pulsed Laser Deposition of Stable Cubic ZnO/MgO Multilayers

Published online by Cambridge University Press:  11 February 2011

P. Bhattacharya ,
Rasmi R. Das  and
Ram S. Katiyar
P. Bhattacharya
Affiliation:
Department of Physics, University of Puerto Rico, San Juan, PR 00931–3343
Rasmi R. Das
Affiliation:
Department of Physics, University of Puerto Rico, San Juan, PR 00931–3343
Ram S. Katiyar
Affiliation:
Department of Physics, University of Puerto Rico, San Juan, PR 00931–3343
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Abstract

Wide bandgap (∼6 eV) ZnO/MgO multilayer thin films have been fabricated using pulsed laser deposition technique from their respective targets on c-plane Al2O3 substrates. The thickness of single ZnO sublayer thickness was varied in the range of 0.75–2.5 nm with a fixed MgO sublayer thickness of 1 nm in order to achieve a total film thickness of ∼300 nm. The structural transition from hexagonal to cubic phase was observed with the decrease in the thickness of single ZnO layer from 2.5 to 0.75 nm that resulted in the increase in bandgap from 3.5 to 6.2 eV. Mg contents of the films were increased from 40 % to 60 % for hexagonal and cubic phases, respectively. The surface roughness and grain structure were not influenced much with the increase of Mg concentration. Resistivity of the films was increased six orders of magnitude with the increase in Mg incorporation. The post annealing at 750° C did not show any significant change in the crystal structure and the optical properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 744: Symposium M – Progress in Semiconductors II–Electronic and Optoelectronic Applications , 2002 , M5.10
Copyright
Copyright © Materials Research Society 2003

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References

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