Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-27T01:07:07.261Z Has data issue: false hasContentIssue false
  • English
  • Français

Properties of Molybdenum Nitride Thin Film Deposited by Reactive Sputter Deposition

Published online by Cambridge University Press:  11 February 2011

Yimin Wang ,
Jin W. Seok  and
Ray Y. Lin
Yimin Wang
Affiliation:
Department of Chemical and Materials Engineering, University of Cincinnati, Cincinnati, OH 45221–0012, U.S.A.
Jin W. Seok
Affiliation:
Department of Chemical and Materials Engineering, University of Cincinnati, Cincinnati, OH 45221–0012, U.S.A.
Ray Y. Lin
Affiliation:
Department of Chemical and Materials Engineering, University of Cincinnati, Cincinnati, OH 45221–0012, U.S.A.
Get access

Abstract

Molybdenum nitride thin film was deposited on silicon wafer with the reactive sputter deposition. γ-Mo2N thin film was obtained with nitrogen content in sputtering gas varying from 10% to 30%. An amorphous structure was observed in the thin film deposited at 50% nitrogen. Crystallinity of Mo-N thin film decreased as the total sputtering gas pressure increased. SEM examinations showed that the surface morphology of Mo-N thin films varies with the nitrogen content in the sputtering gas. The sheet resistivity of as deposited thin film increases with increasing nitrogen content in sputtering gas. The amorphous thin film deposited at 50% nitrogen survived 700°C/5min thermal annealing without obvious crystallization but failed after 800°C/5min thermal annealing, in which the crystalline γ-Mo2N and h-MoSi2 phases were observed. Sheet resistivity measurement showed a decrease in thin film resistivity with increasing thermal annealing temperatures.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 750: Symposium Y – Surface Engineering 2002–Synthesis, Characterization and Applications , 2002 , Y5.11
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Min, Kyung-hoon, Chun, Kyu-Chang, and Kim, Ki-Bum, J. Vac. Sci. Technol. B. Vol. 14(5) (1996) 3263 Google Scholar
2. Lee, Toon-Jik, Suh, Bong-Seok, Rha, Sa-Kyun, Park, Chong-Ook, Thin Solid Films 320 (1998) 141 Google Scholar
3. Lee, Jeong Youb and Park, Jong Wan, Jpn. J. Appl. Phys. Vol. 35 (1996) 4280 Google Scholar
4. Chuang, Jui-Chang, Tu, Shuo-Lun, Chen, Mao-Chieh, Thin Solid Films 346 (1999) 299 Google Scholar
5. Anitha, V. P., Major, S., Chandrashekharam, D., Bhatnagar, Mukesh, Surface Coatings Technology 79 (1996) 50 Google Scholar
6. Shih, K.K. and Dove, D.B., J. Vac. Sci. Technol. A 8(3)(1990) 1359 Google Scholar
7. Lin, Kwang-Lung and Ho, Yu-Jin, J. Vac. Sci. Technol. A13(6) (1995) 2872 Google Scholar
8. Engelmark, F., Fucntes, G., Katardjiev, I. V., Harsta, A., Smith, U. and Berg, S., J. Vac. Sci. Technol. A. 18(4) (2000) 1609 Google Scholar
9. Joint Committee for Powder Diffraction Standards, Powder Diffraction File, International Center for Diffraction Data, Park Lane, 1989 Google Scholar
10. Kim, Dong Joon and Kim, Yong Tae, J. Appl. Phys. 82 (10) (1997) 4847 Google Scholar
11. Nguyen, Viet H., Kranenbug, Herman van and Woerlee, Pierre H., Proceedings of the Third Intenational Wokshop on Materials Science, Hanoi (1999)Google Scholar