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Progress and Prospects of Materials Characterization at Subnanometer Spatial Resolution using Finely Focussed Electron Beams

Published online by Cambridge University Press:  22 February 2011

Michael Isaacson
Michael Isaacson*
Affiliation:
School of Applied and Engineering Physics and the National Research and Resource Facility for Submicron Structures, Cornell University, Ithaca, New York 14853
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Abstract

The prospects of microanalysis using 0.5 nm diameter electron beams are reviewed. This paper will discuss the various characterization possibilities with emphasis on incoherent imaging, energy loss spectroscopy and convergent probe diffraction. Some examples indicating characterization at a 0.5 nm lateral spatial resolution scale will be presented and we will conclude with a discussion of the limits of nanometer characterization.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 48: Symposium E – Applied Materials Characterization , 1985 , 107
Copyright
Copyright © Materials Research Society 1985

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References

REFERENCES

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