Hostname: page-component-586b7cd67f-rdxmf Total loading time: 0 Render date: 2024-11-29T07:17:15.996Z Has data issue: false hasContentIssue false
  • English
  • Français

Processing of Dense Nanocrystalline Zirconia Thin Films by Sol-Gel

Published online by Cambridge University Press:  01 February 2011

Christoph Peters ,
Matthias Bockmeyer ,
Reinhard Krüger ,
André Weber  and
Ellen Ivers-Tiffée
Christoph Peters
Affiliation:
[email protected], University of Karlsruhe (TH), Institute of Materials for Electrical Engineering, Adenauerring 20b, Karlsruhe, N/A, 76131, Germany
Matthias Bockmeyer
Affiliation:
[email protected], Fraunhofer Institute for Silicate Research, Neunerplatz 2, Würzburg, N/A, 97082, Germany
Reinhard Krüger
Affiliation:
[email protected], Fraunhofer Institute for Silicate Research, Neunerplatz 2, Würzburg, N/A, 97082, Germany
André Weber
Affiliation:
[email protected], University of Karlsruhe (TH), Institute of Materials for Electrical Engineering, Adenauerring 20b, Karlsruhe, N/A, 76131, Germany
Ellen Ivers-Tiffée
Affiliation:
[email protected], University of Karlsruhe (TH), Institute of Materials for Electrical Engineering, Adenauerring 20b, Karlsruhe, N/A, 76131, Germany
Get access

Abstract

Via metal organic deposition (MOD) sapphire substrates were multiple dip-coated with a molecular dispersive 8 mol% Y2O3 doped ZrO2 (8YSZ) sol to prepare dense, crack-free thin films. The thin films were consecutively exposed to a tempering program with several rapid thermal annealing (RTA) steps and a final dwell temperature between 500 °C and 1400 °C for 24 h. Grain growth, phase, stoichiometry and macroscopic density of the thin films were analyzed by XRD and SEM. Grain sizes ranged between a few nanometers in diameter at 500 °C and several hundreds of nanometers at 1400 °C.

Keywords

sol-gelnanoscaleionic conductor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 928: Symposium GG – Current and Future Trends of Functional Oxide Films , 2006 , 0928-GG16-01
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Blum, L., Meulenberg, W. A., Nabielek, H., Steinberger-Wilckens, R., Int. J. Appl. Ceram. Technol. 2 (6), 482–492 (2005).Google Scholar
2. Tuller, H. L., Solid State Ionics 131, 143–157 (2000).Google Scholar
3. Mondal, P., Klein, A., Jaegermann, W., Hahn, H., Solid State Ionics 118, 331–339 (1999).Google Scholar
4. Kosacki, I., Suzuki, T., Petrovsky, V., Anderson, H., Solid State Ionics 136–7, 1225–33 (2000).Google Scholar
5. Löbmann, P. C., Jahn, R., Seifert, S., Sporn, D., J. Sol-Gel Sci. Technol. 19, 473–77 (2000)Google Scholar
6. Krüger, R., Bockmeyer, M., Dutschke, A., Löbmann, P., J. Am. Ceram. Soc., (2006) (in press).Google Scholar
7. Fuchs, D., Adam, M., Schweiss, P., Gerhold, S., Schuppler, S., Schneider, R., Obst, B., J. Appl. Phys. 88 (4), 1844 (2000).Google Scholar
8. Rupp, J. L. M., Infortuna, A., Gauckler, L. J.,Acta Materialia, (2006) (in press).Google Scholar
9. Lei, Z., Zhu, Q., Solid State Ionics 176, 2791–97 (2005)Google Scholar
10. Seydel, J., Ph.D. thesis, TU Darmstadt, Germany (2003).Google Scholar