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Process-dependent Coercive Fields in Undoped and Mn-doped BiFeO3 Films Formed on SrRuO3/Pt(111) Electrodes by rf Sputtering

Published online by Cambridge University Press:  31 January 2011

Jeong Hwan Kim ,
Hiroshi Funakubo ,
Yoshihiro Sugiyama  and
Hiroshi Ishiwara
Jeong Hwan Kim
Affiliation:
[email protected]@uos.ac.kr
Hiroshi Funakubo
Affiliation:
[email protected], Tokyo Institute of Technology, Tokyo, Japan
Yoshihiro Sugiyama
Affiliation:
[email protected], Fujitsu Laboratories, Atsugi, Japan
Hiroshi Ishiwara
Affiliation:
[email protected], Tokyo Institute of Technology, Interdisciplinary Graduate School of Science and Engineering, Tokyo, Japan
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Abstract

We deposited BiFeO3 (BFO) thin films on SrRuO3 (SRO)/Pt bottom electrodes by radio-frequency (RF) sputtering. Some samples were formed at the substrate temperature of 550 °C, and others were foremed at 450 °C and post-annealed at 650°C for crystallization. The coercive field in the post-annealed BFO film was smaller than that in the 550°C-deposited BFO film. The coercive field in Mn-doped BiFeO3 (BFMO) films which were deposited at 550 ˚C on SRO/Pt(111) was lower than that in undoped BFO films. Degradation of the remanent polarization was less significant in the post-annealed BFO film.

Keywords

ferroelectricelectrical propertiessputtering
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1199: Symposium F –Multiferroic and Ferroelectric Materials , 2009 , 1199-F06-33
Copyright
Copyright © Materials Research Society 2010

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References

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