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Prism-Film Coupling in Anisotropic Planar Waveguides of Epitaxial (101) Rutile Thin Films

Published online by Cambridge University Press:  21 February 2011

C. M. Foster ,
S.-K. Chan ,
H.L.M. Chang ,
R. P. Chiarello  and
D. J. Lam
C. M. Foster
Affiliation:
Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439
S.-K. Chan
Affiliation:
Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439
H.L.M. Chang
Affiliation:
Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439
R. P. Chiarello
Affiliation:
Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439
D. J. Lam
Affiliation:
Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL 60439
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Abstract

We report optical waveguiding in single-crystal, epitaxial (101) oriented rutile (TiO2) thin films grown on (1120) sapphire (α-Al2O3) substrates using the MOCVD technique. The propagation constants for asymmetric planar waveguides composed of an anisotropic dielectric media applicable to these films are derived. Modifications to the prism-film coupling theory for this anisotropic case are also discussed. By application of this model to (101) oriented rutile thin films, we directly obtain values of the ordinary and extraordinary refractive indexes, no and ne, of the rutile thin films as well as film thicknesses. We obtain typical values of the refractive indexes (no=2.5701±0.0005; ne=2.934±0.001) near to those for bulk rutile single crystals indicating the exceptional quality of these films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 310: Symposium N – Ferroelectric Thin Films III , 1993 , 403
Copyright
Copyright © Materials Research Society 1993

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