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Published online by Cambridge University Press: 21 February 2011
A method for the preparation of planview transmission electron microscope (TEM) specimens of expitaxial Yba2Cu3O7−x (YBCO) thin films deposited on BaF2 by a dc modified planar magnetron sputtering technique is reported. The films are granular with their grains size ranging from a few hundred to a few thousand nanometers. The epitactic nature of the film growth is shown by analyses of moiré fringe patterns and by selected area diffraction methods. It is demonstrated that the YBCO thin film obtained is highly c-axis oriented, with misorientation corresponding to rotations of 9.2° and 90° about the c-axis. Additionally, the film's a or b axes form a 45° angle with that of the substrate.