Hostname: page-component-cd9895bd7-8ctnn Total loading time: 0 Render date: 2024-12-27T02:16:53.611Z Has data issue: false hasContentIssue false
  • English
  • Français

Preparation and Characterization of High-Surface-Area Aluminum Nitride Thin Films

Published online by Cambridge University Press:  10 February 2011

S. A. Monie  and
C. G. Pantano
S. A. Monie
Affiliation:
Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA-16802.
C. G. Pantano
Affiliation:
Department of Materials Science and Engineering, The Pennsylvania State University, University Park, PA-16802.
Get access

Abstract

Free-standing aluminum nitride (AlN) films were prepared by ammonia heat-treatment of pseudoboehmite [AIO(OH)] gels derived from an alumina sol. Supported films on sapphire substrates were also made by spin-coating the alumina sol, followed by ammonia nitridation. The conversion of the specimens to AIN as a function of heat-treatment temperature was studied using various characterization techniques.

For the free-standing films, X-ray diffraction (XRD) showed that upon ammonia treatment, the specimens were first transformed from pseudoboehmite to η-alumina and finally to A1N above 1000°C. 27Al magic-angle spinning nuclear magnetic resonance (MAS-NMR) spectroscopy confirmed the appearance of Al[N]4 coordination at 1000°C, indicative of AlN. Complete conversion to AlN was achieved after 5 hour nitridation at 1200°C. The 1200°C heat-treated films consisted of crystallites of AlN in the size range 0.01 − 0.15 μm, with pores between 0.03 − 0.25 μm in diameter, as observed by TEM/electron diffraction analyses. These films had BET surface areas of approximately 25 m2/g. Nitridation of the supported films to AlN occurred at lower temperatures (∼900°C), as shown by secondary ion mass spectrometry (SIMS) and X-ray photoelectron spectroscopy (XPS).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 454: Symposium S – Advanced Catalytic Materials–1996 , 1996 , 53
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Merle-Méjean, T., Baratón, M.I., Quintard, P., Laurent, Y., and Lorenzelli, V., J. Chem. Soc. Faraday. Trans., 89 (16), 3111 (1993).Google Scholar
2. Monie, S. A., Aurentz, D.J., and Pantano, C.G., Proc. Mater. Res. Soc, 410, 389 (1996).Google Scholar
3. Rocherulle, J., Guyader, J., Verdier, P. and Laurent, Y., Rev. Haut. Temp. Refrac., 22, 83 (1985).Google Scholar
4. Hoch, M. and Nair, M.K., Bull. Am. Ceram. Soc, 58 (2), 187 (1991).Google Scholar
5. Yoldas, B.E., Bull. Am. Ceram. Soc, 54 (3), 289 (1975).Google Scholar
6. Yoldas, B.E., J. Mater. Sci., 10, 1856 (1975).Google Scholar
7. Pierre, A.C., and Uhlmann, D.R., J. Non. Crys. Sol., 82, 271 (1986).Google Scholar
8. Lippens, B.C., Thesis, Technical University of Delft (1961).Google Scholar
9. Fitzgerald, J.J., Kohl, S.D., Piedra, G., Dec, S.F., and Maciel, G.E., Chem. Mater, 6, 1915 (1994).Google Scholar