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Polyimide Nanofoams For Low Dielectric Applications

Published online by Cambridge University Press:  15 February 2011

K. R. Carter ,
H. J. Cha ,
R. A. Dipietro ,
C. J. Hawker ,
J. L. Hedrick ,
J. W. Labadie ,
J. E. Mcgrath ,
T. P. Russell ,
M. I. Sanchez  and
S. A. Swanson
...Show all authors
K. R. Carter
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
H. J. Cha
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
R. A. Dipietro
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
C. J. Hawker
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
J. L. Hedrick
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
J. W. Labadie
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
J. E. Mcgrath
Affiliation:
Virginia Tech, Department of Chemistry, Blacksburg, VA 24061-0344
T. P. Russell
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
M. I. Sanchez
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
S. A. Swanson
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
W. Volksen
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
D. Y. Yoon
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
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Abstract

Foamed polyimides have been developed in order to obtain thin film dielectric layers with very low dielectric constants for use in microelectronic devices. In these systems the pore sizes are in the nanometer range, thus, the term “nanofoam”. The polyimide foams are prepared from block copolymers consisting of thermally stable and thermally labile blocks, the latter being the dispersed phase. Foam formation is effected by thermolysis of the thermally labile block leaving pores the size and shape corresponding to the initial copolymer morphology. Nanofoams prepared from a number of polyimides as matrix materials, were investigated as well as a number of thermally labile polymers. The foams were characterized by a variety of experiments including, TEM, SAXS, WAXD, DMTA, density measurements, refractive index measurements and dielectric constant measurements. Thin film foams, with high thermal stability and dielectric constants approaching 2.0, can be prepared using the copolymer/nanofoam approach.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 381: Symposium F – Low-Dielectric Constant Materials--Synthesis and Applications in Micro. , 1995 , 79
Copyright
Copyright © Materials Research Society 1995

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